Brooks VDM300 Kasutusjuhend

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Brooks

®

VDM300 Vapor Delivery Module

Brooks

®

VDM300

DI Water Vapor Delivery Module

VDM300

Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Brooks

®

VDM300 Vapor Delivery Module

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Brooks

®

VDM300 Vapor Delivery Module

Dear Customer,

We appreciate this opportunity to service your vaporizer and flow control requirements with a Brooks Instrument

device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and

liquid low-flow applications. Brooks provides an array of vaporizer, flow and pressure measurement and control

products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to

medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Brooks

®

VDM300 Vapor Delivery Module

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

i

Brooks

®

VDM300 Vapor Delivery Module

Contents

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Paragraph Page

Number Number

Section 1 Introduction

1-1 Introduction ................................................................................................................................1-1

1-2 How To Use This Manual ...........................................................................................................1-1

1-3 Product Support References......................................................................................................1-2

1-4 Warning, Caution and Notice Statements ..................................................................................1-2

1-5 Product Warranty .......................................................................................................................1-2

1-6 Glossary of Terms and Acronyms ..............................................................................................1-2

1-7 Description .................................................................................................................................1-3

1-8 Specifications for VDM300 Devices ...........................................................................................1-4

1-9 Overview of VDM300 Device Enclosure ....................................................................................1-5

1-10 Internal Layout of VDM300 and Basic Function .........................................................................1-9

1-11 Dimensions of VDM300 Device Enclosure ...............................................................................1-10

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-2

2-4 VDM300 Mounting and Orientation ............................................................................................2-2

2-5 Mechanical Connections ............................................................................................................2-2

2-5-1 Inlet Connections .......................................................................................................................2-4

2-5-2 Outlet Connections.....................................................................................................................2-4

2-6 Electrical Connections................................................................................................................2-5

2-7 Diagnostic Port Connection........................................................................................................2-8

2-8 Return Shipment ........................................................................................................................2-8

2-9 Transit Precautions ....................................................................................................................2-8

2-10 Removal From Storage ..............................................................................................................2-8

2-11 Product Safety Information.........................................................................................................2-9

Section 3 Startup

3 Operation ...................................................................................................................................3-1

3-1 Idle Mode ...................................................................................................................................3-1

3-2 Normal Mode..............................................................................................................................3-1

3-2-1 Start-up (Normal Mode)..............................................................................................................3-2

3-2-2 Ready-to-Use (Normal Mode)

....................................................................................................3-3

3-2-3 Zeroing the VDM300 ..................................................................................................................3-3

3-2-3-1Procedure for Manually Zeroing the VDM300 ............................................................................3-4

3-3 Drain Mode.................................................................................................................................3-4

3-4 Operation of BEST for VDM300 .................................................................................................3-5

Section 4 Maintenance and Troubleshooting

4 Maintenance and Troubleshooting .............................................................................................4-1

4-1 Introduction ................................................................................................................................4-1

4-2 Routine Maintenance .................................................................................................................4-1

4-3 Troubleshooting the VDM...........................................................................................................4-2

4-4 General Troubleshooting Guide .................................................................................................4-3

4-5 Using BEST as a Diagnostic Tool...............................................................................................4-4

4-6 VDM300 Removal ......................................................................................................................4-8

4-7 VDM300 Packaging ...................................................................................................................4-8

4-8 VDM300 Shipping ......................................................................................................................4-8

ii

Brooks

®

VDM300 Vapor Delivery Module

Contents Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Paragraph Page

Number Number

Section 5 Product Description Code

5 VDM300 Product Description Code ...........................................................................................5-1

Section A Essential Instructions .............................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

Figure Page

Number Number

1-1 VDM Vapor Delivery Module ......................................................................................................1-1

1-2 Front View of the VDM300 .........................................................................................................1-5

1-3 Front View Details of the VDM300 LED Indicators.....................................................................1-6

1-4 Bottom View of the VDM ............................................................................................................1-7

1-5 VDM300 Block Diagram.............................................................................................................1-9

1-6 Dimensions - VDM300 ..............................................................................................................1-10

2-1 VDM300 Installation Orientation.................................................................................................2-3

2-2 Diagram of Electrical Connections to the VDM300 ....................................................................2-5

Tables

Table Page

Number Number

1-1 Terms and Acronyms .................................................................................................................1-2

1-2 Specifications for Standard VDM300..........................................................................................1-4

2-1 VDM300 Analog Connector Pin-Out...........................................................................................2-6

3-1 Signals Required for Switching Modes on the VDM300.............................................................3-1

4-1 General Troubleshooting Information and Courses of Action.....................................................4-3

4-1a Error Logic for Devices Without Low Level Alarm Configuration................................................4-3

4-1b Error Logic for Devices With Low Level Alarm Configuration.....................................................4-3

4-2 List of Possible Alarm Codes Detected by the VDM300 ............................................................4-4

5-1 VDM Product Description Code .................................................................................................5-1

1-1

Section 1 Introduction

Brooks

®

VDM300 Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

1-1 Introduction

The VDM300 is a self-contained, ultra-high purity vapor delivery module

providing precise, low flow deionized (DI) water vapor for high purity

applications such as microelectronics manufacturing. Utilizing a heated, all-

welded titanium vapor tank with automated level-sensing and filling, the

VDM300 produces vapor flow in a non-superheated vapor stage to reduce

the aggressive effects of DI water. Vapor flow is controlled by an integrated

Brooks Instrument high temperature thermal mass flow controller. The

thermal mass flow controller is a high stability flow sensor compatible with

the elevated internal temperatures found in the VDM300.

1-2 How To Use This Manual

This manual is intended to provide the user with all the information

necessary to install, operate, troubleshoot and maintain this vaporizer. The

manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

Figure 1-1 VDM Vapor Delivery Module

1-2

Brooks

®

VDM300 Vapor Delivery Module

Section 1 Introduction

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service

locations and to obtain other documents that support the VDM300 Series.

Those documents include:

• Brooks VDM300 data sheet (DS-VAP-VDM300-eng)

• Supplemental Manual for Brooks

®

Instrument EtherCAT for VDM300

Series (X-DPT-EtherCAT-VDM300-eng; part number: 541B217AAG)

• Supplemental Manual for Brooks Instrument Expert Support Tool

(X-SW-BEST-eng; part number 541B197AAG)

1-4 Warning, Caution and Notice Statements

Warning, caution and notice statements are located throughout this manual

in ANSI format.

A WARNING statement indicates a potentially hazardous situation which, if

not avoided, COULD result in death or serious injury.

A CAUTION statement indicates a potentially hazardous situation which, if

not avoided, MAY result in minor or moderate injury. It may also be used to

alert against unsafe practices.

A NOTICE statement describes specific information that requires special

attention.

1-5 Product Warranty

Product warranty information can be found on the back cover of this

manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers,

and applicable warranty periods according to product group.

1-6 Glossary of Terms and Acronyms (Refer to Table 1-1)

Table 1-1 Terms and Acronyms

Term/ Acronym Definition

BEST Brooks Expert Support Tool (GUI)

COO Cost of Ownership

DIW Deionized Water

DSP Digital Signal Processor

EtherCAT Ethernet for Control Automation Technology is an open high

performance Ethernet-based fieldbus system

F.S. Full scale

GUI Graphical user interface (refer to BEST)

IEC International Electrotechnical Commission

LA Link Active

LED Light-emitting diode

MFC Mass flow controller

PID Proportional Integral Derivative

PDC Product description code

PSID Pounds per square inch differential

PSIG Pounds per square inch gauge

RH Relative humidity

RJ-45 Standard type of connector for network cables featuring eight

pins to which the wire strands of a cable interface electrically

SDS Safety data sheet

S.P. Setpoint

1-3

Section 1 Introduction

Brooks

®

VDM300 Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

1-7 Description

The VDM300 is a self-contained, ultra-high purity vapor delivery module

providing precise, low flow deionized (DI) water vapor for high purity

applications such as microelectronics manufacturing. Utilizing a heated,

all-welded titanium vapor tank with automated level-sensing and filling, the

VDM300 produces vapor flow in a non-superheated vapor stage to reduce

the aggressive effects of DI water. Vapor flow is controlled by an integrated

Brooks Instrument high temperature thermal mass flow controller. The

mass flow sensor is a high stability flow sensor compatible with the

elevated internal temperatures found in the VDM300.

The result is a highly accurate, robust and responsive vapor delivery

module for challenging conditions.

• High temperature capability ensures reliable delivery of condensable

gases and precursors

• Digital measurement and control enhances accuracy (±1% of setpoint

>10% FS) and repeatability (±0.2% F.S.)

• Ultra-high purity vapor flow path ensures integrity and purity of the gas/vapor

• Ultra-stable flow sensor reduces maintenance resulting in superior

uptime and lower cost of ownership (COO)

• All metal diaphragm-free control valve design optimizes reliability

Ultra High Purity Flow Path

• The mass flow controllers are constructed with a 10μ in Ra max surface finish.

• Overall reduced surface area and un-swept volumes for faster dry-down

during purge steps

• Long-term sensor and device stability for maximum yield and throughput

Ultra High Purity Process Connections

VDM300 supports all metal seal/UHP industry gas connection interface

standards for full OEM and process coverage.

• DI Water Inlet: ¼” VCR Male or ¼” tube compression fitting

• DI Water Vapor Outlet: 3/8-½” VCR Male fitting

• Tank Drain: 1/8" Instant Tube fitting

Analog & Digital Interfaces

The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc)

digital controls and alarms or optionally up to 24 Vdc when using an

external power supply, a USB diagnostic port, and EtherCAT

communications. Analog and digital controls are transmitted via the 15-pin

D-subminiature connector. Reference Table 2-1 for pin assignments. USB

digital communication is transmitted via the micro-USB diagnostics port.

Optional EtherCAT digital communication is transmitted via the dual RJ-45

connectors. Reference Supplemental Manual for Brooks Instrument

EtherCAT for VDM300 Series (X-DPT-VDM300-EtherCAT) for EtherCAT

assignments and Supplemental Manual for Brooks Instrument Brooks

Expert Support Tool (X-SW-BEST-eng) for diagnostic port communication.

1-4

Brooks

®

VDM300 Vapor Delivery Module

Section 1 Introduction

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Table 1-2 Specifications for Standard VDM300

1-8 Specifications for VDM300 Devices (See Table 1-2)

DescriptionDescription

Description

Performance SpecificationsPerformance Specifications

Performance Specifications

11

1

Full Scale Ranges (HFull Scale Ranges (H

Full Scale Ranges (H

22

2

O)O)

O) 3000 sccm

Turndown RatioTurndown Ratio

Turndown Ratio 20:1

Step Response TimeStep Response Time

Step Response Time ≤ 2 seconds (±2% of setpoint)

AccuracyAccuracy

Accuracy ±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)

LinearityLinearity

Linearity ±0.5% of full scale

RepeatabilityRepeatability

Repeatability ±0.2% of full scale

Temperature CoefficientTemperature Coefficient

Temperature Coefficient 0.05% F.S. per °C (zero and span)

Valve ShutdownValve Shutdown

Valve Shutdown <0.5% F.S. (water vapor)

ElectricalElectrical

Electrical

CommunicationCommunication

Communication Analog or EtherCAT

ConnectionsConnections

Connections 15-pin D-Sub and dual RJ-45

Input SignalsInput Signals

Input Signals Flow setpoint (0 to 5 Vdc)

Start up/drain

Output SignalsOutput Signals

Output Signals Flow output (0 to 5 Vdc)

Ready to use

PowerPower

Power DC: ±15 Vdc ±5% @ 1.2 amp

AC: 230 Vac, 50/60 Hz, 290 watts nominal

Diagnostic PortDiagnostic Port

Diagnostic Port Micro USB

MechanicalMechanical

Mechanical

FittingsFittings

Fittings See Model Code for list

WeightWeight

Weight Dry: 15lbs Wet: 16lbs

Mounting OrientationMounting Orientation

Mounting Orientation Vertical (inlet down)

EnvironmentalEnvironmental

Environmental

Maximum Outlet PressureMaximum Outlet Pressure

Maximum Outlet Pressure 200 Torr

DI Water Supply PressureDI Water Supply Pressure

DI Water Supply Pressure 10 to 40 psig (20 psig recommended)

DI Water QualityDI Water Quality

DI Water Quality UHP: ≥18 mega ohm-cm

NN

N

22

2

Purge Pressure Purge Pressure

Purge Pressure 10 to 40 psig (20 psig recommended)

AmbientAmbient

Ambient

Temperature RangeTemperature Range

Temperature Range 15°C to 45°C

HumidityHumidity

Humidity 0 to 95% RH, non-condensing

CertificationsCertifications

Certifications

Electromagnetic CompatibilityElectromagnetic Compatibility

Electromagnetic Compatibility Fully compliant to Directive 2014/30/EU (EN: 61326-1:2013)

Low VoltageLow Voltage

Low Voltage Fully compliant to Directive 2014/35/EC (EN: 61010-1:2010)

RoHSRoHS

RoHS Fully compliant to Directive 2011/65/EU

REACHREACH

REACH Fully compliant to Directive EC 1907/2006

SEMI E54.20-1108SEMI E54.20-1108

SEMI E54.20-1108 Standard for Sensor/Actuator Network Communication for EtherCAT

1. All performance specifications apply only in the ready state, ready light on.

Special conditions for safe use:Special conditions for safe use:

Special conditions for safe use:

A. To ensure full EMC protection the ferrite core included with the device (Wurth Electronics Inc Part Number 74271131 ) must be installed to the control cable.

B. To ensure full EMC protection a shielded AC power cable and a shielded control cable (<30 m. length) must be supplied by the user.

1-5

Section 1 Introduction

Brooks

®

VDM300 Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Figure 1-2 Front View of the VDM300

1-9 Overview of VDM300 Device Enclosure

1-6

Brooks

®

VDM300 Vapor Delivery Module

Section 1 Introduction

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Figure 1-3 Front View Details of the VDM300 LED Indicators

Figure 1-3 (above) shows a detailed view of the switches and indicators

located on the front of the VDM300. The following is a description of each

switch and indicator.

ZERO: This is a momentary detent switch that activates a zeroing function

to remove any zero offset that may have accumulated over time during

normal VDM300 operation. Refer to the section called VDM300 Zeroing

later in this manual for information on when and how to use this function

properly.

DEVICE READY: (Green LED)This indicates when the VDM300 is Ready-

to-Use (RTU). lt also serves as an indicator when a drain cycle is complete

(blinkíng).

WARM UP: (Amber LED)This indicates when the VDM300 is warming up

(solid) or at the desired temperature (blinking).

DEVICE FAULT: (Red LED) This indicates an alarm/fault condition.

ECAT ERR: (Red LED) Indicates EtherCAT error status. See the

Supplemental Manual for Brooks Instrument EtherCAT for VDM300 Series

( X-DPT-VDM300-EtherCAT) for details on the various states.

ECAT ID: These three 16-position rotary switches (X100, X10 and X1) are

used to set the serial address for the VDM300 device in EtherCAT

communication networks. The three switches create a 3-digit address as in

the following example: if the X100 switch is set to “A”, the X10 switch to “5”

and the X1 to “B”, the serial address would be “A5B”.

1-7

Section 1 Introduction

Brooks

®

VDM300 Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Figure 1-4 Bottom View of the VDM

Figure 1-4 is a diagram of the bottom view of the VDM300. The following is

a description of the various connections and features:

A. lnput/Output: This connection is a 15-Pin D-subminiature (DB-15) plug

(male). DC power and operational signals are routed through this

connector. Reference Table 2-1 for details.

B. DIAG: This connection is a micro USB port. This provides

communication access to the VDM300 for use by the Brooks Expert

Support Tool (BEST). See Section 3-4 Operation of the GUI for VDM300

and the Brooks GUl manual for information on how to properly connect to

and utilize this port.

1-8

Brooks

®

VDM300 Vapor Delivery Module

Section 1 Introduction

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

C. EtherCAT: This connection is a dual RJ-45 connection. This connection

allows the user to send commands and set points and receive flow and alarm

signals from the VDM300 utilizing an EtherCAT network. See Figure 1-4.

D. Power Entry Module: The power entry module is used to connect AC

power to the VDM300 tank heaters. See Section 1-13 VDM300 lnternal

Layout and Basic Function for more details about the tank heaters. The

VDM300 is configured to accept 230 VAC power, provided by the end user,

via a shielded AC power cord with an IEC C-13 connector.

The power entry module consists of 3 main features as follows:

a. The AC input plug is a standard IEC C-14 connector where AC power

can be connected to the VDM300.

b. The ON/OFF switch for switching AC power to the VDM300 tank heaters

on or off.

c. The fuse drawer holds two 250V 3A fuses to protect the AC tank heaters.

E. Dl Water lnlet: This is where the Dl water supply is to be connected by

the end user. The fitting is either a 1/4" VCR Male fitting or a 1/4"

compression tube fitting depending on the configuration ordered. Ensure

the DI water source is equal to or better than UHP (≥ 18 mega ohm-cm).

This is also where a nitrogen gas supply is to be connected for the purpose

of draining the VDM300. See Section 2-5-1 Inlet Connections for more

details and instructions on how to connect Dl water and/or N2 to the inlet.

F. Tank Drain: This is a 1/8" lnstant Tube Fitting. This is the outlet through

which the Dl water is drained from the tank. See Section 1-10 VDM300

lnternal Layout and Basic Function for more details about the tank.

1-9

Section 1 Introduction

Brooks

®

VDM300 Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

1-10 Internal Layout of VDM300 and Basic Function

Figure 1-5 below illustrates the internal layout of the VDM300 system. The

VDM300 has a titanium tank inside that serves as a reservoir for Dl water

and a Mass Flow Controller (MFC).The Dl water is heated to the vapor

state in the tank through the use of heaters attached to the tank and a

heater control system along with the vacuum outlet pressure. The liquid

water level is monitored by a level detection system (not shown in diagram)

in the tank. The MFC delivers the appropriate amount of Dl water vapor on

demand through the Dl water vapor outlet. The fill valve controls the flow of

Dl water into the tank which works in tandem with the level detection

system to maintain the optimal amount of liquid Dl water in the tank for

vaporization during operation. The tank drain controlled by the drain valve

allows the tank to be emptied for maintenance and extended periods of

downtime.

Figure 1-5 VDM300 Block Diagram

1-10

Brooks

®

VDM300 Vapor Delivery Module

Section 1 Introduction

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

1-11 Dimensions of VDM300 Device Enclosure (See Figure 1-6)

Figure 1-6 Dimensions - VDM300

2-1

Brooks

®

VDM300 Vapor Delivery Module

Section 2

Installation

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

2-1 General

This section provides installation instructions for the Brooks VDM300

Vapor Delivery Module. The installation of the VDM300 involves mounting

the device, making the required mechanical connections and making the

required electrical connections

2-2 Receipt of Equipment

When the instrument is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding their

liability. A report should be submitted to your nearest Product Service

Department.

Brooks Instrument

407 W. Vine Street

P.O. Box 903

Hatfield, PA 19440 USA

Toll Free (888) 554 FLOW (3569)

Tel (215) 362 3700

Fax (215) 362 3745

E-mail: [email protected]

www.BrooksInstrument.com

Europe Asia

Brooks Instrument GmbH Brooks Instrument Korea, Ltd.

Zur Wetterwarte 50 Haus 377/B, D-406 Bundang Techno Park 151

01109 Dresden Sungnam, Kyungki-do, 463-070

Germany Korea

Tel +49 (0) 351 215 20 442 Tel +82 31 708 2522

In case you need technical assistance:

USA 888 275 8946 Taiwan +886 3 5590 988

Europe +49 351 215 2040 China +86 21 5079 8828

Japan +81 3 5633 7100 Singapore +6297 9741

Korea +82 31 708 2521

Remove the envelope containing the packing list. Unpack and inspect the

VDM300 and additional items for any possible shipping damage. The

VDM300 is shipped with two each 312 series replacement fuses for the

power entry module, a 6’ length of 1/8" O.D. Teflon tubing, a ferrite core for

the control cable, the certificate of conformance/ final test data and the

Installation & Operations Manual. The tubing can be connected to the tank

drain when draining Dl water from the tank inside the VDM300. Contact

Brooks if there are any problems or if more information is required.

The following items can be purchased separately; these items are not

necessary for the installation and are not used for normal operation of the

VDM300 but can be utilized for troubleshooting:

The Brooks Expert Support Tool (BEST) provides diagnostic tools and an

alternate access to VDM300 functions.

NOTE: The BEST must be installed on a separate computer in order to perform any

diagnostic function. Contact Brooks for information on purchasing the software.

2-2

Brooks

®

VDM300 Vapor Delivery Module

Section 2

Installation

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it is

recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C

(45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 VDM300 Mounting and Orientation

Figure 2-1 shows the proper mounting orientation for the VDM300.The

VDM300 should be mounted using four 5/16" (7.9mm) screws tightening

them to the screw manufacturer’s recommended specifications.

2-5 Mechanical Connections

Figure 1-6 shows the mechanical dimensions of the VDM300

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free

from shock and vibration.

• Install the device in such a manner that permits easy purge and removal if

the device requires servicing.

Prior to installation, ensure that all piping is clean and free from

obstructions. Install piping in such a manner that permits easy access to

the device if removal becomes necessary.

2-3

Brooks

®

VDM300 Vapor Delivery Module

Section 2

Installation

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

Figure 2-1 VDM300 Installation Orientation

2-4

Brooks

®

VDM300 Vapor Delivery Module

Section 2

Installation

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

August, 2017

2-5-1 Inlet Connections

Dl Water & Nitrogen lnlet: The VDM300 can be ordered with a 1/4" VCR

male fitting or a 1/4" tube compression fitting. This inlet is where the Dl

water source is connected for normal operation, or where the nitrogen

source is connected when draining the VDM300. It is up to the user to

make sure that the proper source is available for the particular mode of

operation desired.

NOTE: The inlet pressure for both fluid sources must be between 10-40

psig for proper operation.

Tank Drain: The VDM300 has a 1/8" lnstant Tube Fitting. This is the port

where the water will drain out of the tank of the VDM300.Make sure that

the 1/8" drain tube is properly connected to this port when draining the

tank. Leave this drain line permanently connected as repeated coupling

and uncoupling can cause unnecessarily damage the tubing.

2-5-2 Outlet Connections

Vapor Outlet: The VDM300 has a 1/2" VCR male fitting for this

connection. The VDM300 is designed to deliver vapor into a vacuum so be

sure that the connection to the tool will remain at or below 200 Torr during

normal operation.

It is highly recommended that a shutoff valve be installed downstream of

the VDM300 to isolate it during device zeroing.

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