1-4
Brooks
®
VDM300 Vapor Delivery Module
Section 1 Introduction
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
August, 2017
Table 1-2 Specifications for Standard VDM300
1-8 Specifications for VDM300 Devices (See Table 1-2)
DescriptionDescription
DescriptionDescription
Description
Performance SpecificationsPerformance Specifications
Performance SpecificationsPerformance Specifications
Performance Specifications
11
11
1
Full Scale Ranges (HFull Scale Ranges (H
Full Scale Ranges (HFull Scale Ranges (H
Full Scale Ranges (H
22
22
2
O)O)
O)O)
O) 3000 sccm
Turndown RatioTurndown Ratio
Turndown RatioTurndown Ratio
Turndown Ratio 20:1
Step Response TimeStep Response Time
Step Response TimeStep Response Time
Step Response Time ≤ 2 seconds (±2% of setpoint)
AccuracyAccuracy
AccuracyAccuracy
Accuracy ±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)
LinearityLinearity
LinearityLinearity
Linearity ±0.5% of full scale
RepeatabilityRepeatability
RepeatabilityRepeatability
Repeatability ±0.2% of full scale
Temperature CoefficientTemperature Coefficient
Temperature CoefficientTemperature Coefficient
Temperature Coefficient 0.05% F.S. per °C (zero and span)
Valve ShutdownValve Shutdown
Valve ShutdownValve Shutdown
Valve Shutdown <0.5% F.S. (water vapor)
ElectricalElectrical
ElectricalElectrical
Electrical
CommunicationCommunication
CommunicationCommunication
Communication Analog or EtherCAT
ConnectionsConnections
ConnectionsConnections
Connections 15-pin D-Sub and dual RJ-45
Input SignalsInput Signals
Input SignalsInput Signals
Input Signals Flow setpoint (0 to 5 Vdc)
Start up/drain
Output SignalsOutput Signals
Output SignalsOutput Signals
Output Signals Flow output (0 to 5 Vdc)
Ready to use
PowerPower
PowerPower
Power DC: ±15 Vdc ±5% @ 1.2 amp
AC: 230 Vac, 50/60 Hz, 290 watts nominal
Diagnostic PortDiagnostic Port
Diagnostic PortDiagnostic Port
Diagnostic Port Micro USB
MechanicalMechanical
MechanicalMechanical
Mechanical
FittingsFittings
FittingsFittings
Fittings See Model Code for list
WeightWeight
WeightWeight
Weight Dry: 15lbs Wet: 16lbs
Mounting OrientationMounting Orientation
Mounting OrientationMounting Orientation
Mounting Orientation Vertical (inlet down)
EnvironmentalEnvironmental
EnvironmentalEnvironmental
Environmental
Maximum Outlet PressureMaximum Outlet Pressure
Maximum Outlet PressureMaximum Outlet Pressure
Maximum Outlet Pressure 200 Torr
DI Water Supply PressureDI Water Supply Pressure
DI Water Supply PressureDI Water Supply Pressure
DI Water Supply Pressure 10 to 40 psig (20 psig recommended)
DI Water QualityDI Water Quality
DI Water QualityDI Water Quality
DI Water Quality UHP: ≥18 mega ohm-cm
NN
NN
N
22
22
2
Purge Pressure Purge Pressure
Purge Pressure Purge Pressure
Purge Pressure 10 to 40 psig (20 psig recommended)
AmbientAmbient
AmbientAmbient
Ambient
Temperature RangeTemperature Range
Temperature RangeTemperature Range
Temperature Range 15°C to 45°C
HumidityHumidity
HumidityHumidity
Humidity 0 to 95% RH, non-condensing
CertificationsCertifications
CertificationsCertifications
Certifications
Electromagnetic CompatibilityElectromagnetic Compatibility
Electromagnetic CompatibilityElectromagnetic Compatibility
Electromagnetic Compatibility Fully compliant to Directive 2014/30/EU (EN: 61326-1:2013)
Low VoltageLow Voltage
Low VoltageLow Voltage
Low Voltage Fully compliant to Directive 2014/35/EC (EN: 61010-1:2010)
RoHSRoHS
RoHSRoHS
RoHS Fully compliant to Directive 2011/65/EU
REACHREACH
REACHREACH
REACH Fully compliant to Directive EC 1907/2006
SEMI E54.20-1108SEMI E54.20-1108
SEMI E54.20-1108SEMI E54.20-1108
SEMI E54.20-1108 Standard for Sensor/Actuator Network Communication for EtherCAT
1. All performance specifications apply only in the ready state, ready light on.
Special conditions for safe use:Special conditions for safe use:
Special conditions for safe use:Special conditions for safe use:
Special conditions for safe use:
A. To ensure full EMC protection the ferrite core included with the device (Wurth Electronics Inc Part Number 74271131 ) must be installed to the control cable.
B. To ensure full EMC protection a shielded AC power cable and a shielded control cable (<30 m. length) must be supplied by the user.