Brooks 4850 Kasutusjuhend

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

PC100 Series

Ultra-High Purity Digital Pressure Control Devices

PC115 Pressure Controller, Model PC125 Pressure Controller with Flow Meter

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017PC100 Series

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Dear Customer,

We appreciate this opportunity to service your pressure control and flow measurement requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas

and liquid low-flow applications. Brooks provides an array of pressure control and flow measurement products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com.

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017PC100 Series

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PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Contents

Paragraph Page

Number Number

Section 1 General Information

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ...............................................................................................................1-1

1-3 Product Support References.........................................................................................................1-2

1-4 Notice and Caution Statements..................................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a PC100 Series Device...........................................................................................1-2

1-7 Industry Standard References....................................................................................................... 1-2

1-8 Glossary of Terms and Acronyms .................................................................................................1-2

1-9 Description ....................................................................................................................................1-5

1-10 Specifications for PC100 Series Devices ...................................................................................... 1-6

Section 2 Installation

2-1 General ......................................................................................................................................... 2-1

2-2 Receipt of Equipment.................................................................................................................... 2-1

2-3 Recommended Storage Practice .................................................................................................. 2-1

2-4 Return Shipment ...........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................... 2-2

2-6 Removal from Storage ..................................................................................................................2-2

2-7 Gas Connections...........................................................................................................................2-2

2-8 In-Line Filter .................................................................................................................................. 2-2

2-9 Mechanical Installation ..................................................................................................................2-3

2-10 Flow Controller Installation Arrangement ...................................................................................... 2-3

2-11 Purge the Gas Supply Line Before PC100 Series Installation.......................................................2-4

2-12 Position and Mount the PC100 Series ..........................................................................................2-5

2-13 Perform a Leak Test......................................................................................................................2-6

2-14 Zeroing the PC100 Series - Setup ................................................................................................ 2-6

2-14-1 Zeroing the PC100 Series Pressure Transducer from the LCD Display Panel (PC115 & PC125) ...... 2-6

2-14-2 Zeroing PC125 Series Flow from LCD Display Panel ...................................................................2-8

2-15 Performance Checks .................................................................................................................... 2-9

2-16 Electrical Connections.................................................................................................................. 2-10

2-16-1 DeviceNet Connections................................................................................................................2-10

Section 3 Operation

3-1 General ......................................................................................................................................... 3-1

3-2 Theory of Operation for Pressure Control ..................................................................................... 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview .......................................................................................................................................4-1

4-2 Maintenance.................................................................................................................................. 4-1

4-3 Troubleshooting............................................................................................................................. 4-3

4-4 Troubleshooting Checklist .............................................................................................................4-3

Section 5 Product Description Code

5-1 Overview .......................................................................................................................................5-1

Appendix A: Essential Instructions ...........................................................................................................A-1

Warranty, Local Sales/Service Contact Information.......................................................................... Back Cover

ii

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Contents

Figure Page

Number Number

1-1 PC100 Series Digital Pressure Controller .....................................................................................1-1

1-2 LCD Display ..................................................................................................................................1-6

1-3 Dimensions - PC100 Series ..........................................................................................................1-8

2-1 Typical PC100 Series Configurations............................................................................................ 2-3

2-2 PC100 Series Mounting Attitude Positions for UPSTREAM Applications...................................... 2-5

2-3 PC100 Series Mounting Attitude Positions for DOWNSTREAM Applications ...............................2-5

2-4 Display with PSI Reading ..............................................................................................................2-7

2-5 Display Reading Zero PSI .............................................................................................................2-7

2-6 Display Set to %FS ....................................................................................................................... 2-8

2-7 % Flow Display Set to Zero ........................................................................................................... 2-8

2-8 Diagnostic Port..............................................................................................................................2-9

2-9 PC100 Series DeviceNet Connection .......................................................................................... 2-10

2-10 PC100 Series Interface Options................................................................................................... 2-10

Table Page

Number Number

1-1 Industry Standard References.......................................................................................................1-3

1-2 Terms and Acronyms ....................................................................................................................1-4

1-3 Specifications - PC100 Series.......................................................................................................1-7

4-1 PC100 Series Troubleshooting Guide ...........................................................................................4-4

5-1 PC100 Series Product Description Code Table............................................................................. 5-1

1-1

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

1-1 Introduction

Brooks Instrument's PC100 Series pressure control and flow measurement

devices deliver outstanding performance, reliability, and system simplicity.

Built on the proven, advanced technology of the GF100 Series mass flow

controllers, process throughput and yield are maximized while process

costs are reduced. The PC100 Series is designed for semiconductor,

MOCVD, and other pressure control applications that require a high purity

all-metal flow path.

• PC115 Pressure Controller and PC125 Pressure Controller with

integrated thermal mass flow metering. Initial product offering includes N2

and H2 gases with full scale 1000 Torr pressure operation.

• An independent diagnostic/service port to to tune the pressure controller

without removing the unit

• Long-term stability due to extremely low wetted surface area, and

corrosion resistant Hastelloy

®

sensor and valve seat

Figure 1-1 PC100 Series Digital Pressure Controller

1-2 How to Use This Manual

This manual is intended to provide the user with all the information

necessary to install, operate, troubleshoot and maintain these pressure

control devices. The manual is organized in the following sections:

Section 1 General Information

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

1-2

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service

locations and to obtain other documents that support the PC100 Series.

Those documents include:

- Brooks DeviceNet Supplemental manual for PC100 Series:

X-DPT-DeviceNet-PC100-PC-eng:

- Brooks PC100 Series Data Sheet:

DS-PR-PC100-Series-PC-eng

1-4 Notice and Caution Statements

Warning, caution and notice statements are located throughout this manual

in the ANSI format. A WARNING statement indicates a potentially

hazardous situation which, if not avoided, COULD result in death or serious

injury. A CAUTION statement indicates a potentially hazardous situation

which, if not avoided, MAY result in minor or moderate injury. It may also be

used to alert against unsafe practices. A NOTICE statement describes

specific information that requires special attention.

1-5 Product Warranty

Product warranty information can be found on the Back Cover of this

Manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers,

and applicable warranty periods according to product group.

1-6 How to Order a PC100 Series Device

Refer to Section 5.

1-7 Industry Standard References

Refer to Table 1-1.

1-8 Glossary of Terms and Acronyms

Refer to Table 1-2

1-3

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement

SEMI E12 Standard temperature and pressure

SEMI E16 Guideline for determining and describing MFC leak rates

SEMI E17 Guideline for MFC transient characteristics tests

SEMI E18 Guideline for temperature specifications of the MFC

SEMI E27 Standard for MFC and MFM linearity

SEMI E28 Guideline for pressure specifications for the MFC

SEMI E52 Practice for referencing gases used in digital MFCs

SEMI E54 Sensor actuator network connections for DeviceNet

SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs

SEMI E66 Test method for determining particle contribution by MFCs

SEMI E67 Test method for determining reliabilty of MFCs

SEMI E68 Test method for determining warm-up time of MFCs

SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs

SEMI E80 Test method for determining attitude sensitivity of MFCs

SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates

SEMI F19 Specification for the finish of the wetted surface of electro polished

216L stainless steel components

SEMI F20 Specifications for 316L stainless steel bar, extruded shapes, plate, and

investment castings for components used in ultra-high purity semi

manufacturing applications

SEMI F36 Guide for dimensions and connections of gas distribution components

SEMI F37 Method for determination of surface roughness parameters for gas

distribution system components

SEMI F44 Guideline for standardization of machined stainless steel weld fittings

SEMI F45 Guideline for standardization of machined stainless steel reducing fittings

SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity

SEMI S2 Environmental, Health and Safety Guidelines

SEMI S9 Dielectric testing

SEMI S10 Risk assessment

SEMI S12 Decontamination of fielded products

1-4

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

Table 1-2 Terms and Acronyms

Term or Acronym Definition

CSR Customer Special Requirement

CVD Chemical Vapor Deposition

DeviceNet A 5-wire local network I/O communication device

that employs a command/response

communication protocol

DSP Digital Signal Processor

EPI Epitaxy (EPI) A process technology where a pure silicon

crystalline structure is deposited or “grown” on a

bare wafer, enabling a high-purity starting point

for building the semiconductor device.

F.S. Full Scale

LED Light Emitting Diode

PSIA Pounds per Square Inch Absolute

PSID Pounds per Square Inch Differential

PSIG Pounds per Square Inch Gauge

HC Standard Configuration w/ Hastelloy® sensors

(to reduce reaction to corrosive gases)

S.P. Setpoint

Step Technology Enables fast set point control through a high

speed DSP and low volume drive circuit

VIU Vertical mounting attitude with inlet side facing up

1-5

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

1-9 Description

The Brooks PC100 Series digital pressure control with patented flow

sensor combined with a high speed ARM processor and fast acting

diaphragm-free valve assembly enables:

• Faster response and settling time for improved pressure control

• Reduced diverted gas consumption and associated abatement costs

• User programmable start-up function for processes requiring a slow

ramped pressure control

Accessories:

A331710003 Cable Assembly 2.5 mm

214F027AAA USB-RS485 Converter with DB-9 Female

A332295001 Power Supply PC

A332297001 Cable, Power, DeviceNet

PC125 Only - Advanced Thermal Flow Measurement Sensor

Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an

enhanced sensor manufacturing and burn in process incorporates a unique

orthogonal sensor mounting orientation to eliminate sensor drift caused by

valve heating effects and eliminates thermal siphoning effects. This unique

sensor configuration includes an optimized temperature profile for gases

prone to thermal decomposition. This design results in:

• Enhanced signal to noise performance for improved accuracy at low

set points

• Superior reproducibility at elevated temperature through new

isothermal packaging and onboard conditioning electronics with

ambient temperature sensing and compensation

• Improved long-term stability

High Purity Flow Path

The Brooks PC100 Series has an all metal, corrosion resistant Semi F20

compliant wetted flow path with highly corrosion resistant Hastelloy C-22

valve seat and jet orifice.

• Overall reduced surface area and un-swept volumes for faster dry-down

during purge steps

• Long-term sensor and device stability for maximum yield and throughput

Mechanical Configurations

• 1-1/8" body width, 1/4" VCR male

Enhanced Diagnostics and User Interface

The Brooks PC100 Series devices provide for in-line device evaluation and

instantaneous troubleshooting through:

• Independent diagnostic/service port

• High visibility LCD display with easy accessible push button for local

indication of Flow (%), Temperature (

o

C), Pressure (PSIA/kPa/Torr) and

Network Address

1-6

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

Figure 1-2 LCD Display

• Zero button to easily re-zero the device during scheduled maintenance.

Zero button will zero pressure transducer of thermal sensor depending on

what is visible on the display.

This combination of features results in limited service interruption and

reduced downtime.

Communication Interfaces

The PC100 Series supports DeviceNet™ communication protocol.

DeviceNet is a multi-drop connection that allows a maximum of 64 devices

to be connected on the same network. Brooks Instrument’s DeviceNet

profile has been certified by the ODVA™ (Open DeviceNet Vendor’s

Association).

1-10 Specifications for PC100 Series Devices

See Table 1-3 for specifications for the PC100 Series.

See Figure 1-3 for dimensions for the PC100 Series

1-7

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

Table 1-3 Specifications - PC100 Series

PerformancePerformance

Performance

PC115PC115

PC115

PC125PC125

PC125

Embedded Thermal Flow Sensor: No Yes

Pressure Control Mode: Downstream and Upstream Downstream

Full Scale Range: o Min Flow Range: 0-20 sccm H2; 0-20 sccm N2 10 slm N2 and H2

o Max Flow Range: 0-5 slm H2; 0-5 slm N2

Pressure ReadingPressure Reading

Pressure Reading

Reference: Downstream: 34 to 100 psia 34 to 100 psia

Upstream: 0 Torr to 350 Torr

Accuracy: ±1% of reading

Zero Temp. Coefficient: ±0.02% of F.S./°C

Span Temp. Coefficient: ±0.04% of reading/°C

Pressure ControlPressure Control

Pressure Control

Range: Downstream: >20 Torr to 100% F.S. >20 Torr to 100% F.S.

Upstream*: >150 Torr to 100% F.S.

*Upstream controller turndown is directly tied to reference pressure. Control range is assuming hard vacuum on the outlet and 150 Torr min DP to achieve max flow.

Accuracy: <10% F.S. = ±0.2% of F.S.

>10% to 100% = ±1% of reading

Response Time: <1 sec typ. (excluding system time constant)

Flow ReadingFlow Reading

Flow Reading

Measurement Range: N/A 2 to 100% of F.S.

Accuracy

::

: N/A ±1% of reading> 35% F.S.

±0.35% of F.S. 2 to 35% F.S.

Repeatability: N/A ±0.2% of F.S.

Resolution: N/A ±0.1% of F.S.

Zero Temp. Coefficient: N/A <0.05% of F.S./°C

Span Temp. Coefficient: N/A <0.08% of reading/°C

Zero Stability: N/A <0.5% per year

Valve Leak-by: <1% of orifice F.S. (N2 @ 25 psig inlet to atm.)

RatingsRatings

Ratings

Operating Temperature Range: 10 to 50°C

Transducer Pressure Range: 1000 Torr F.S.

Transducer Over Pressure Limit: 2 x F.S. range

Differential Pressure: Upstream min DP 150 Torr; Downstream max DP 45 psid Max DP 45 psid

Leak Integrity (external): 1 x 10

-10

atm. cc/sec He

ElectricalElectrical

Electrical

Digital Communication: DeviceNet

Electrical Connection DeviceNet: via 5-pin “M12” connector

Diagnostic/Service Port: RS485 via 2.5 mm jack

Power Supply/Consumption DeviceNet: 545 mA max. @ +11-25 Vdc

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status Lights: MFC Health, Network Status

Display Type: Top Mount Rotatable Integrated LCD

Viewing Distance Fixed: 10 feet

Units Displayed: Resolution Flow (%), Temp. (°C), Pressure (Torr, psia, kPa)/0.1 (unit)

MechanicalMechanical

Mechanical

Valve Type: Normally Closed

Wetted Materials:

SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304

Surface Finish:

5μ inch Ra (0.1 μm Ra)

ComplianceCompliance

Compliance

EMC: EMC Directive 2014/30/EU CE: EN61326-1: 2013

Environmental Compliance: RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

1-8

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

Figure 1-3 Dimensions - PC100 Series

PC100 Series - VCR

®

Configuration

2-1

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 2 Installation

2-1 General

This section provides installation instructions for the Brooks PC100 Series

Pressure Control Devices. The installation process consists of purging the

gas supply line prior to installation, unpacking and inspecting the device,

connecting the device to the gas supply line and testing for leaks.

2-2 Receipt of Equipment

When the equipment is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding his liability.

A report should be submitted to the nearest Brooks Instrument location

listed on the Global Service Network page on our website:

BrooksInstrument.com/GlobalSupportCenters

Remove the envelope containing the packing list. Carefully remove the

instrument from the packing case. Make sure spare parts, accessories and

documentation are not discarded with the packing materials. Inspect for

damaged or missing parts.

This device has been assembled, calibrated, and double-vacuum bagged

in a Class 100 clean room. In your semi-clean area, remove the outer bag

only. Pass the device into your clean area. Remove the second clean room

compatible bag only when the device is ready to be tested and/or installed

in your clean system.

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it is

recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C

(45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 Return Shipment

Prior to returning any instrument to the factory for any reason, visit our

website for instructions on how to obtain a Return Materials Authorization

Number (RMA #) and complete a Decontamination Statement to

accompany it: BrooksInstrument.com/Service. All instruments returned to

Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s)

used in the instrument. Failure to provide this information will delay

processing of the instrument.

Instrument must have been purged in accordance with the following:

2-2

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 2 Installation

2-5 Transit Precautions

To safeguard against damage during transit, transport the device to the

installation site in the same container used for transportation from the

factory, if circumstances permit.

2-6 Removal from Storage

Upon removal of the device from storage, a visual inspection should be

conducted to verify its "as-received" condition. If the device has been

subject to storage conditions in excess of those recommended (refer to "2-

3 Recommended Storage Practice" on p. 2-1), it should be subjected to a

pneumatic pressure test in accordance with applicable vessel codes. To

maintain a devices ultraclean integrity, this service should be performed by

the factory or one of the certified service centers.

2-7 Gas Connections

Prior to installation, ensure that all piping is clean and free from

obstructions. Install piping in such a manner that permits easy access to

the device if removal becomes necessary.

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the

device to prevent the possibility of any foreign material entering the flow

sensor or control valve. The filtering element should be replaced

periodically or ultrasonically cleaned.

2-3

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 2 Installation

Figure 2-1 Typical PC100 Series Configurations

2-9 Mechanical Installation

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free

from shock and vibration.

• Leave sufficient room for access to the user interface, display and MAC

ID and baud rate switches (if equipped) at the top of the device.

• Install the device in such a manner that permits easy purge and removal

if the device requires servicing.

2-10 Flow Controller Installation Arrangement

Typical configurations are shown below in Figure 2-1.

2-4

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 2 Installation

2-11 Purge the Gas Supply Line Before PC100 Series Installation

Before operating the PC100 Series, the gas supply line must be completely

purged with nitrogen or argon to ensure the line is free from toxic or

flammable gases, contaminants, moisture, and oxygen. The purge gas

must be free of moisture and oxygen to less than 100 ppb. Purge the gas

lines as follows or in accordance to prescribed company and safety

procedures.

1. Shut off the process gas supply valve(s) upstream of the PC100 Series.

If such a valve is not available, shut the valve on the gas panel. Tag the

valve at this point to prevent accidental re-exposure of the process gas

to the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the

process gas. Cycle purging consists of evacuating to a low pressure

adequate to induce out-gassing and then purging to remove adhered

moisture and oxygen. If a toxic or reactive gas is present and a clogged

PC100 Series is suspected, then proceed with caution. Pump down

and purge the PC100 Series from both downstream and upstream

lines. If check valves are present in the gas line, both pumping down

and purging are required. Pumping down without purging is inadequate.

If a good vacuum source is not available, the PC100 Series can be de-

contaminated by purge only.

3. Repeat the purge cycle several times within 2-4 hours to complete the

cleaning. For toxic and corrosive gasses, it is recommended to use

100-120 cycles.

2-5

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 2 Installation

Figure 2-2 PC100 Series Mounting Attitude Positions for UPSTREAM Applications

Figure 2-3 PC100 Series Mounting Attitude Positions for DOWNSTREAM Applications

2-12 Position and Mount the PC100 Series

Position the PC100 Series so that the gas flow is pointed in the direction of

the flow arrow on the PC100 Series rear S/N label. The various mounting

positions for UPSTREAM applications are described in Figure 2-2, and the

mounting positions for DOWNSTREAM applications are described in

Figure 2-3.

The standard orientation for the PC100 Series is Horizontal Base Down (HBD).

The PC100 Series is configured with ¼" VCR fittings, secure the PC100

Series block to the gas panel with two, 8-32-UNC-2B" screws. Then

connect the inlet/ outlet fittings to the gas supply line using two

wrenches. Tighten the fittings to manufacturer recommendations.

2-6

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 2 Installation

2-13 Perform a Leak Test

It is critical to leak test the gas supply lines and PC100 Series connections

before turning on the process gas supply after any new installation. Check

for leaks using a helium leak detector or any other appropriate leak test

method. Follow leak test specifications as defined by integrator.

2-14 Zeroing the PC100 Series - Setup

The PC100 Series pressure transducer and flow meter zeroing process is

performed from the backlight LCD display on top of the PC100 Series.

OEM tools using a microprocessor or computer for operating the PC100

Series should sequence the PC100 Series off between processes. To

accomplish this, simply provide a zero set point. The PC100 Series will

shut off automatically.

Shut-off valves, whether upstream or downstream from the PC100 Series,

should be programmed to turn on before the PC100 Series is turned on

and turned off after the PC100 Series is turned off.

The following steps are required before the PC100 Series is zeroed.

1. Make sure that the PC100 Series has been installed inside the

equipment (panel) for at least four hours and powered up at least one

hour prior to zeroing. This insures that the PC100 Series is in its "use

attitude" and is operating at normal temperature. If the PC100 Series is

subjected to a vacuum purge for more than one minute, turn off the

PC100 Series (ie., provide a zero setpoint) for a time period of twice the

vacuum purge time.

2. Read the output signal of the PC100 Series. This output signal is the

initial flow in percent of full scale. The output signal should be 0.0 (±

0.1%). If the output signal is too high, re-zero the PC100 Series as

described below.

2-14-1 Zeroing the PC100 Series Pressure Transducer from the LCD Display Panel (PC115 & PC125)

1. Place the PC100 Series under a strong vacuum with the PC100

Series set to 100% set point. Make sure that upstream valve is

closed and the downstream valve is open. Allow time for the

upstream pressure to bleed off.

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