Brooks 9861 Kasutusjuhend

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series™ Series

Model 9861

9000 Series Analog Thermal Mass Flow Controller

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

•To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

•Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Dear Customer,

We appreciate this opportunity to service your ow measurement and control requirements with a Brooks

Instrument device. Every day, ow customers all over the world turn to Brooks Instrument for solutions to their

gas and liquid low-ow applications. Brooks provides an array of ow measurement and control products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Ofce listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

i

Contents

Section 1 Introduction

Paragraph Page

Number Number

1-1 Introduction ............................................................................................................................................... 1-1

1-2 How to Use This Manual .......................................................................................................................... 1-1

1-3 Product Support References .................................................................................................................... 1-2

1-4 Notice and Caution Statements ................................................................................................................ 1-2

1-5 Product Warranty ...................................................................................................................................... 1-2

1-6 How to Order a 9000 Series Device ......................................................................................................... 1-2

1-7 Industry Standard References .................................................................................................................. 1-2

1-8 Glossary of Terms and Acronyms ............................................................................................................. 1-3

1-9 Description ................................................................................................................................................ 1-4

1-10 Specications for 9000 Series Devices .................................................................................................... 1-6

Section 2 Theory of Operations and Features

Paragraph Page

Number Number

2-1 Introduction ............................................................................................................................................... 2-1

2-2 General Description .................................................................................................................................. 2-1

2-3 Theory of Operation ................................................................................................................................. 2-3

2-4 Standard Features .................................................................................................................................... 2-6

2-5 Optional Features ..................................................................................................................................... 2-7

Section 3 Installation

Paragraph Page

Number Number

3-1 General ..................................................................................................................................................... 3-1

3-2 Receipt of Equipment ............................................................................................................................... 3-1

3-3 Recommended Storage Practice .............................................................................................................. 3-2

3-4 Return Shipment ....................................................................................................................................... 3-2

3-5 Transit Precautions ................................................................................................................................... 3-2

3-6 Removal from Storage .............................................................................................................................. 3-2

3-7 Gas Connections ...................................................................................................................................... 3-3

3-8 Mechanical Installation ............................................................................................................................. 3-3

3-9 In-Line Filter .............................................................................................................................................. 3-3

3-10 Flow Controller Installation Arrangement .................................................................................................. 3-3

3-11 Purge the Gas Supply Line Before MFC Installation ................................................................................ 3-3

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

ii

Contents

3-12 Position and Mount the 9000 Series MFC ................................................................................................ 3-4

3-13 Connect to a Gas/Vapor Supply Line ....................................................................................................... 3-5

3-14 Connect to Power Supply ......................................................................................................................... 3-5

Section 4 Operational Checks and Performance

Paragraph Page

Number Number

4-1 Introduction ............................................................................................................................................... 4-1

4-2 Zero the MFC ........................................................................................................................................... 4-1

4-3 Check the MFC for Proper Sequencing .................................................................................................... 4-4

4-4 Check the MFC for Full Flow .................................................................................................................... 4-4

4-5 Check the MFC for Proper Calibration ..................................................................................................... 4-5

4-6 MFC Flow Response Check ..................................................................................................................... 4-5

Section 5 Maintenance and Troubleshooting

Paragraph Page

Number Number

5-1 Introduction ............................................................................................................................................... 5-1

5-2 Routine Maintenance ................................................................................................................................ 5-1

5-3 Troubleshooting ........................................................................................................................................ 5-2

5-4 System Troubleshooting Guide ................................................................................................................ 5-2

5-5 MFC Troubleshooting Checklist ................................................................................................................ 5-5

5-6 MFC Removal ........................................................................................................................................... 5-5

5-7 Packaging the MFC .................................................................................................................................. 5-6

5-8 MFC Return Shipping ............................................................................................................................... 5-6

Section 6 Product Description Code

Paragraph Page

Number Number

6-1 9861 Product Description Code ................................................................................................................ 6-1

Section A Essential Instructions

Warranty, Local Sales/Service Contact Information ................................................................................Back Cover

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

iii

Contents

Figures

Figure Page

Number Number

1-1 9000 Series Analog Thermal Mass Flow Controller ................................................................................. 1-1

1-2 9000 Series Dimensions ........................................................................................................................... 1-8

2-1 MFC Components .................................................................................................................................... 2-1

2-2 Bypass Assembly Functional Diagram ..................................................................................................... 2-2

2-3 Measurement and Control Electronics ..................................................................................................... 2-2

2-4 Control Valve Assembly ............................................................................................................................ 2-3

2-5 Thermal Sensor Operation ....................................................................................................................... 2-3

2-6 MFC Theory of Operation Block Diagram ................................................................................................ 2-5

3-1 Typical High Temperature Vapor Supply Arrangement ............................................................................. 3-3

3-2 9000 Series Mounting Attitude Positions .................................................................................................. 3-4

3-3 9000 Series Controller with 9-Pin D Connector and Cardedge Connector .............................................. 3-6

3-4 9000 Series Controller with 15-Pin D Connector and Cardedge Connector ............................................ 3-6

3-5 9000 Series Cardedge Connector Pinouts ............................................................................................... 3-7

4-1 MFC Installation ....................................................................................................................................... 4-2

4-2 Auto Zero Circuit ....................................................................................................................................... 4-3

4-3 Voltage Output (Setpoint) Versus Gas Flow ............................................................................................ 4-5

5-1 MFC Can Side Label ................................................................................................................................ 5-4

Tables

Table Page

Number Number

1-1 Industry Standard References .................................................................................................................. 1-2

1-2 Product Terms and Acronyms ................................................................................................................... 1-3

2-1 MFC Component Functions ...................................................................................................................... 2-1

2-2 Conversion Factors .................................................................................................................................. 2-4

2-3 Gas Flow Correction Factors .................................................................................................................... 2-4

4-1 Environmental Factors That Affect MFC Performance ............................................................................. 4-1

4-2 Zero Drift ................................................................................................................................................... 4-3

5-1 System Troubleshooting Guide ................................................................................................................ 5-3

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

1-1

Section 1 Introduction

1-1 Introduction

The 9000 Series (Model 9861) remains the optimum choice for critical

precursor and dopant vapor delivery in semiconductor, MOCVD, and

optical ber manufacturing. The 9000 Series products are thermal mass

ow controllers and meters designed for challenging high-temperature

delivery of condensable precursors and dopants. A high-purity, high-leak

integrity metal ow path ensures compatibility with all processes gases

and vapors. The patented IsoSensor™ is a high-stability ow sensor

compatible with the elevated environmental temperatures [≤ 150°C (≤

300°F)] found in heated gas lines and gas boxes (baking systems).

The ultra-low drift performance of the IsoSensor™ reduces the need

for frequent re-zeroing and recalibration typical in high temperature

applications.

Figure 1-1 9000 Series Analog Thermal Mass Flow Controller

1-2 How to Use This Manual

This manual is intended to provide the user with all the information

necessary to install, operate, troubleshoot, and maintain these thermal

mass ow devices. The manual is organized in the following sections:

Section 1 Introduction

Section 2 Theory of Operation and Features

Section 3 Installation

Section 4 Operation

Section 5 Maintenance and Troubleshooting

Section 6 Product Description Code

Section A Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before

attempting to operate or repair these devices.

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

1-2

Section 1 Introduction

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service

locations and to obtain other documents that support the 9000 Series.

Those documents include:

DS-TMF-9861-Series-MFC-eng

1-4 Notice and Caution Statements

Warning, caution and notice statements are located throughout this

manual in the ANSI format.

• A WARNING statement indicates a potentially hazardous situation

which, if not avoided, COULD result in death or serious injury.

• A CAUTION statement indicates a potentially hazardous situation

which, if not avoided, MAY result in minor or moderate injury. It may

also be used to alert against unsafe practices.

• A NOTE statement describes specic information that requires

special attention.

1-5 Product Warranty

Product warranty information can be found on the back cover of this

manual and on the Brooks website at www.BrooksInstrument.com.

This information provides general warranty information, limitations,

disclaimers, and applicable warranty periods according to product group.

1-6 How to Order a 9000 Series Device

Refer to Section 6.

1-7 Industry Standard References

Table 1-1 Industry Standard References

Reference

Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test

Requirement

SEMI E12 Standard temperature and pressure

SEMI E16 Guideline for determining and describing MFC leak rates

SEMI E17 Guideline for MFC transient characteristics tests

SEMI E18 Guideline for temperature specications of the MFC

SEMI E27 Standard for MFC and MFM linearity

SEMI E28 Guideline for pressure specications for the MFC

SEMI E52 Practice for referencing gases used in digital MFCs

SEMI E54 Sensor actuator network connections for DeviceNet

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

1-3

Section 1 Introduction

Table 1-1 Industry Standard References

Reference

Number Reference Description

SEMI E56 Test method for determining accuracy, linearity,

repeatability, short-term reproducibility, hysteresis of

thermal MFCs

SEMI E66 Test method for determining particle contribution by MFCs

SEMI E67 Test method for determining reliability of MFCs

SEMI E68 Test method for determining warm-up time of MFCs

SEMI E69 Test method for reproducibility and zero drift for thermal

MFCs

SEMI E80 Test method for determining attitude sensitivity of MFCs

SEMI E16-90 Guidelines for determining and describing mass ow

controllers leak rates

SEMI F19 Specication for the nish of the wetted surface of electro

polished 216L stainless steel components

SEMI F20 Specications for 316L stainless steel bar, extruded

shapes, plate, and investment castings for components

used in ultra-high purity semi manufacturing applications

SEMI F36 Guide for dimensions and connections of gas distribution

components

SEMI F37 Method for determination of surface roughness parameters

for gas distribution system components

SEMI F44 Guideline for standardization of machined stainless steel

weld ttings

SEMI F45 Guideline for standardization of machined stainless steel

reducing ttings

SEMI F47 Specications for semiconductor processing equipment

voltage sag immunity

SEMI S2 Environmental, Health and Safety Guidelines

SEMI S9 Dielectric testing

SEMI S10 Risk assessment

SEMI S12 Decontamination of elded products

1-8 Glossary of Terms and Acronyms

Table 1-2 Product Terms and Acronyms

Term Denition

Analog An analog signal is one in which a base carrier’s

alternating current frequency is modied in some way,

such as by amplifying the strength of the signal or varying

the frequency, in order to add information to the signal.

Bypass

Assembly

Reduces or restricts the ow of gas through the MFC in

order to maintain a specied ow range.

Control Valve

Assembly

An electromagnetic solenoid control valve that is used to

open and/or close the ow of gas through the MFC. Refer

to Figure 8 for a detailed description.

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

1-4

Section 1 Introduction

Table 1-2 Product Terms and Acronyms

Term Denition

CVD

Chemical vapor deposition (CVD) is a chemical process

often used in the semiconductor industry for the deposition

of thin lms of various materials.

Diffusion

Diffusion is the spontaneous spreading of matter (particles

or molecules), heat, momentum, or light.

Digital

A digital system is one that uses discrete numbers,

especially binary numbers, or non-numeric symbols such

as letters or icons, for input, processing, transmission,

storage, or display, rather than a continuous spectrum of

values (an analog system).

The distinction of digital versus analog refers to method of

input, data storage and transfer, internal workings, and the

kind of display.

EPI

A process technology that is used in some semiconductor

designs where a pure silicon crystalline structure is

deposited or grown on a bare wafer, enabling a high-purity

starting point for building the semiconductor device.

HOV

Horizontal On Vertical

HOS

Horizontal On Side

Mass Flow

MFC

Mass Flow Controller

MFM

Mass Flow Meter

PCB

Printed Circuit Board

Plasma Etching

Plasma etching removes organic and inorganic

contamination, increases wetability, increases bond

strength, and removes residues.

RTD

Rate of Temperature Differential

RMA

Return Material Authorization

sccm

Standard Cubic Centimeters per Minute

SEMI

Semiconductor Equipment Manufacturing International

sensor

Measures the gas temperature difference across the

sensor and feeds this information to the PCB assembly.

slm

Standard Liters per Minute

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

1-5

Section 1 Introduction

Table 1-2 Product Terms and Acronyms

Term Denition

Sputtering

Sputtering is a non chemical method of depositing thin

lms of material, usually metals, onto a wafer.

SP

Setpoint

Volumetric Flow

VTP

Valve Test Point

µ in. Ra Micro Inch rough Average

% FS

Percent of Full Scale Flow

1-9 Description

Brooks Instrument’s 9000 Series is a metal-sealed analog/digital thermal

mass ow measurement and control instrument that offers unparalleled

performance in critical low pressure precursor and dopant vapor delivery.

The 9000 Series is designed for use in high temperature ambient

environments between 0–150°C (32–302°F). The result is a highly

accurate, robust, and responsive MFC for challenging conditions.

• High temperature capability ensures reliable delivery of condensable

gases and precursors

• Digital measurement and control enhances accuracy (±1% of

setpoint) and repeatability (±0.15% FS)

• Ultra-high purity ow path (10 or 4µ in. Ra) ensures integrity and

purity of the gas/vapor

• Ultra-stable ow sensor (≤0.6% per year w/o auto-zero) reduces

maintenance resulting in superior uptime and lower COO

• All metal diaphragm-free control valve design optimizes reliability

1-9-1 Ultra High Purity Flow Path

The Brooks 9861 model device is constructed with a 4 μ in. Ra max

surface nish.

• Overall reduced surface area and un-swept volumes for faster dry-

down during purge steps

• Long-term sensor and device stability for maximum yield and

throughput

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

1-6

Section 1 Introduction

1-9-2 Ultra High Purity Process Connections

9000 Series supports all metal seal/UHP industry gas connection

interface standards for full OEM and process coverage.

• 1/4-in. VCR on 1-1/2-in. body

• 3/8-in. VCR on 1-1/2-in. body

1-9-3 Analog and Digital Communication Interfaces

The 9000 Series supports analog 0–5 Vdc and RS-485 communication

protocols. Analog connections can be accessed via the RS-485 or

analog-only connector option utilizing the dual RJ11 ports, the Cardedge

connector, or the 9-pin/15-pin D connector. RS-485 is a multi-drop

connection that allows a maximum of 32 devices to be connected on the

same network. A range of low prole adapter cables facilitate replacing

previously installed devices eliminating the need to carry multiple devices

of the same gas/range but different electrical connectors.

1-10 Specications for 9000 Series Devices

WARNING

Do not operate this instrument in excess of the specications

listed in this manual. Failure to heed this warning can result in

serious personal injury and/or damage to the equipment.

CAUTION

It is the user’s responsibility to select and approve all materials

of construction. Careful attention to metallurgy, engineered

materials, and elastomeric materials is critical to safe operation.

Specications and features are subject to change without notice.

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

1-7

Section 1 Introduction

Settling Time (to within 2% of setpoint)

Fast Start ≤ 1.0 sec (per SEMI E17-91)

Soft Start Linear 20% per sec (0 to 100% in 5 sec)

Accuracy (N

2

equivalent)

35% to 100% F.S. ±1% setpoint (per SEMI E56-96)

< 35% F.S. ±0.35% full scale (per SEMI E56-96)

Repeatability (full scale) ±0.15% (per SEMI E56-96)

Linearity (full scale) ±0.5% (per SEMI E27-92)

0.007% per psi (N

2

)

Zero 0.05% full scale per °C

Span 0.1% full scale per °C

Leak Integrity 1 x 10

-10

atm-cc/sec (He) (per SEMI E16-90)

Automatic Zero Optional (customer programmable)

Zero Drift ≤ 0.6% per year without auto-zero

Thermal Siphoning and Attitude Sensitivity < 0.1% full scale (30 psi SF

6

)

Standard Flow Range 3 sccm to 10 slm (N

2

equivalent)

Control Range (full scale) 2-100%

Valve Leak Rate ≤1% full scale

Gases All

Ambient Temperature Range 0-150°C (32-302°F)

Maximum Operating Pressure 620 kPa (90 psia)

1.33-350 kPa (10 torr - 50 psia)

Warm-up Period 30 minutes

Mounting Position HOV or HOS

Valve Normally closed solenoid

Input/Output Signal

Setpoint Input

Output Monitor

Digital Input/Output RS485L (via RJ11 ports)

External: TTL signal

Power

Controller (RS485) +15 Vdc (160 mA max.), -15 Vdc (160 mA max.)

Meter (Analog) +15 Vdc (50 mA max.), -15 Vdc (50 mA max.)

Power Consumption 9861 = 5 watts max.

Surface Finish 4µ inch Ra

Fittings 1/4” VCR

®

, 3/8” VCR

®

Valve Position Downstream

Materials Wetted Components: 316L SS/KM-45/304/7MO+

Weight 1.2 kg (2.65 lbs)

Traceability National Institute of Standards and Technology (N.I.S.T.)

Standard Temperature and Pressure 0°C and 760 mm Hg per (SEMI E 12-96)

Performance Specifications

Operating Limits

Electrical Characteristics

Mechanical Characteristics

Calibration References

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

1-8

Section 1 Introduction

3.50"

1.47"

4.00"

3.00"

0.63"

2 X 8-32 UNC-2B X .18/[4.6] DP.

mounting holes

15 pin “D”

connector standard

Calibration

data label

1.48

[37.6]

.94/

[23.9]

.94/

[23.9]

.06/[1.5]

3.00

[76.2]

.74

[18.8]

3.65

[92.7]

0.49

[12.4]

1.90

[48.3]

.75

[19.1]

Access for

zero adjustment

.55/[14.0]

.38

[9.7]

2.25

[57.2]

.98

[24.9]

1.25

[31.8]

Top label includes model,

range, gas + serial number

4.88/[124.0]

Block part number

Serial

number

label

X.XX = dimensions in inches

[XX.X] = dimensions in millimeters

Fitting type

Overall Inlet

1/4" VCR Male

4.88 in./124.0 mm

0.94 in./23.9 mm

Outlet

0.94 in./23.9 mm

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Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

2-1

Section 2 Theory of Operation and Features

2-1 Introduction

This section provides a general description of a typical MFC and how it

operates. Standard and optional features are also described herein.

2-2 General Description

Figure 2-1, MFC Components, below shows a typical MFC and its

primary components. Component functions are listed in Table 2-1, MFC

Component Functions, below.

Electrical

Interface Connector

Block (3)

Outlet Fitting (9)

Inlet Fitting (1)

PCB Cover

Bypass Assembly (2)

Parallel Sensor (4)

PCB Assembly (5)

(10)

Control Valve Ass’y (8)

Jet (6)

Plunger Assembly (7)

Figure 2-1 MFC Components

Table 2-1 MFC Component Functions

Component) Component Function

Bypass Assembly (2) Restricts the ow of gas through the MFC. Refer to

Figure 2-2, Bypass Assembly Functional Diagram,

on p. 1-6 for further details.

Parallel Sensor (4) Measures the gas temperature across the sensor

and feeds this information to the PCB assembly.

Refer to Figure 2-2, Bypass Assembly Functional

Diagram, on p. 1-6 and to Figure 2-5, Thermal

Sensor Operation, on p. <?> for further details.

PCB Assembly (5) Electronic circuitry, which stores bypass/sensor

infor mation, and also provides the ability to ne

tune the MFC in order to achieve proper ow

and response times. Refer to Figure 2-1, MFC

Components, above, and to Figure 2-6, MFC

Theory of Operation Block Diagram, on p. <?> for

details.

Jet (6) A preset orice that restricts the ow of gas to

reduce upstream and downstream pressure

uctuations.

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

2-2

Section 2 Theory of Operation and Features

Table 2-1 MFC Component Functions

Component) Component Function

Plunger Assembly (7) Moves the coil inside the valve assembly to allow

ow through the MFC.

Control Valve Assem-

bly (8)

Opens and/or closes gas ow through the MFC.

Refer to Figure 2-3, Measurement and Control

Electronics, below, and to Figure 2-4, Control Valve

Assembly, on p. <?> for further details.

Electrical Interface

Connector (10)

Communication interface from the MFC to the tool’s

software. Refer to “3-14 Connect to Power Supply”

on p. <?> for further details.

Sensor

Bypass

Sensor measurements represent total ow as long as the splitting ratio

constant (where constant = Q

S/QB )

Q

Total

= Q

s

+ Q

b

Figure 2-2 Bypass Assembly Functional Diagram

Figure 2-3 Measurement and Control Electronics

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

2-3

Section 2 Theory of Operation and Features

Orice

Coil Assembly

Plunger

Flat Spring

Seat

Jet

Cover

Wiring to PCB

Figure 2-4 Control Valve Assembly

2-3 Theory of Operation

To obtain accurate and stable ow rates to the tool, each MFC measures

and controls three areas: gas temperature, gas properties, and gas

pressure.

2-3-1 Gas Temperature

Each MFC utilizes a thermal sensor tube to measure the mass ow rate

(m) of gas passing through the MFC. Each gas molecule has a specic

ability to pick up heat. This property (Cp) directly relates to mass and

physical structure of the molecule. Gas is heated in a tube and resistive

temperature devices measure the temperature gradient along the tube.

This process is described in the following formula and shown in Figure

2-5, Thermal Sensor Operation, below.

Sensor output = mCp T

Heater

Expansion Rod

0

0 L

L/2

T

0

T1

No Flow

T

Temperature

Tube Length

RDT1

RDT2

Flow

Figure 2-5 Thermal Sensor Operation

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

2-4

Section 2 Theory of Operation and Features

2-3-2 Gas Properties

The thermal sensor relies on established thermal mass properties from

the gas being used. The temperature dependence is associated with the

molecule’s rotational and vibrational degrees of freedom represented

by N. Since a mole of any perfect gas occupies the same volume at

standard conditions (22,414.00 cc/mol at 0 degrees C at 1 atm pressure),

molar specic heat is essentially specic heat (J/gm/K) multiplied by

standard density (gm/mol). Therefore, the following formula can be

expressed where ps is the standard density.

C

p

x ps = (J/gmK) x gm/mol = J/mol x K

The conversion factor (CF) then becomes,

CF = (Ngas/NN

2

) x (C

p

x ps) N

2

/ (C

p

x ps)gas

N is shown in Table 2-2, Conversion Factors, below. For example, a ow

of 5 sccm nitrogen corresponds to a ow of 3.66 sccm of phosphine

(PN

3

) in Table 2-3, Gas Flow Correction Factors, below.

Table 2-2 Conversion Factors

Gas Type N

Monatomic 1.04

Diatomic 1.00

Triatomic 0.94

Polytomic 0.88

Table 2-3 Gas Flow Correction Factors

Gas Thermal MFC

N

2

1.0

AsH

3

0.742

PH

3

0.673

BF

3

0.528

2-3-3 Gas Pressure

Inlet pressure is often overlooked as a source of potential zero error on

MFCs. Many high density, low viscosity gases exhibit slight changes in

zero output as a function of MFC inlet pressure. Gases such as tungsten

hexauoride (WF6) and many uorocarbons are especially sensitive to

this problem.

Under certain conditions, lighter gases such as H2 and He may experi-

ence oscillation problems if inlet pressures are too high. A simple way of

minimizing this problem is to keep the inlet pressure as low as possible.

Brooks

®

9000 Series

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

2-5

Section 2 Theory of Operation and Features

MFC theory of operation is described in greater detail in Figure 2-6, MFC

Theory of Operation Block Diagram, below.

Gas

Inlet

Port

Gas

Outlet

Port

Hysteresis Network (Tuning)

Soft Start

Network

Valve Assembly

(Normally Closed)

LC

Circuit

Speed

Up

Network

(Bypass/Sensor Measurement)

Differential

Amplifier

Speed Up

Amplifier

Upstream

Sensor

Downstream

Sensor

Main

Path

Capillary

Bypass

Linearity Correction

Amplifier

Comparitor

Valve

Driver

Sensor Voltage Out (Variable)

Setpoint Voltage In (Reference)

Valve OFF/ON

Current

Regulator

(Calibration)

+

-

+

-

+

-

+

-

Bridge

Figure 2-6 MFC Theory of Operation Block Diagram

Refer to this block diagram during the following discussion.

Installation and Operation Manual

X-TMF-9000-Series-MFC-eng

Part Number: 541B194AAG

August, 2018

Brooks

®

9000 Series

2-6

Section 2 Theory of Operation and Features

When voltage is applied to the MFC valve assembly, the valve assembly

opens and allows gas to pass into the inlet port and through the bypass

assembly and sensor. As gas passes through the bypass assembly,

the sensor measures the gas temperature across the upstream and

downstream area of the sensor and relays that information to the

printed circuit board (PCB) circuitry that consists of several ampliers

and a speed up network. The temperature difference across the sensor

determines indi cated gas ow.

When a specied amount of gas ow is needed at the process chamber,

the tool initiates a setpoint voltage command from 1-5 Vdc. For example,

if the bypass assembly allows up to 90 sccm ml/min of gas and the

setpoint command is 4 Vdc, only 80% of the maximum ow range (or

72 sccm ml/min) would ow through the MFC outlet port. If the setpoint

were reduced to 2 Vdc, only 18 sccm ml/min would ow through the

MFC outlet port.

When gas is exhausted out of the bypass assembly it enters the valve

assembly area. Inside the valve assembly, gas travels through a preset

orice (called a jet) and into the plunger area. The jet helps to control

upstream and downstream pressure uctuations. The plunger pushes on

the valve coil, which in turn, regulates the proper amount of gas owing

out of the outlet port.

An accurate amount of gas must enter the process chamber at a steady

ow rate and at a specied response time without any pressure uctua-

tions. Information stored within the PCB circuitry provides the means to

perform tuning and calibration functions before the unit is shipped. This

tuning and calibration process adjusts the MFC to precise ow rates and

response times in accordance to customer requirements.

2-4 Standard Features

2-4-1 Attitude

Each MFC is built for a specic attitude, either Horizontal On Side

(HOS), or Horizontal or Vertical (HOV). Further details are described in

the installation instructions in Chapter 3.

2-4-2 Calibration Conditions

MFCs ordered as Atmosphere are calibrated with the MFCs outlet

exhausting to atmosphere. MFCs order as Vacuum are calibrated with

the MFCs to vacuum.

2-4-3 Standard Temperature and Pressure Operating Range

MFCs are calibrated at 0°C and operate up to 760 mm Hg.

2-4-4 Calibration Traceability

MFCs use the National Institute of Standards and Technology (NIST) as

a guideline.

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