Brooks GF125 / GF126 Kasutusjuhend

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Brooks

®

GF100 Series

High Purity/Ultra-High Purity Digital Thermal

Mass Flow Devices

Model GF125 Analog I/O Model GF125 Digital I/O

Model GF135 Analog I/O Model GF121 Analog I/O

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017GF100 Series

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas

and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various

industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical

instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com.

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017GF100 Series

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

i

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Contents

Paragraph Page

Number Number

Section 1 General Information

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ...............................................................................................................1-1

1-3 Product Support References.........................................................................................................1-2

1-4 Notice and Caution Statements..................................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF100 Series Device........................................................................................... 1-2

1-7 Industry Standard References.......................................................................................................1-2

1-8 GF100 Series Gas Table ............................................................................................................... 1-2

1-9 Glossary of Terms and Acronyms ................................................................................................. 1-2

1-10 Description ....................................................................................................................................1-5

1-11 Specifications for GF100 Series Devices ...................................................................................... 1-8

Section 2 Installation

2-1 General ......................................................................................................................................... 2-1

2-2 Receipt of Equipment.................................................................................................................... 2-1

2-3 Recommended Storage Practice .................................................................................................. 2-1

2-4 Return Shipment ...........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................... 2-2

2-6 Removal from Storage .................................................................................................................. 2-2

2-7 Gas Connections...........................................................................................................................2-2

2-8 In-Line Filter .................................................................................................................................. 2-2

2-9 Mechanical Installation .................................................................................................................. 2-2

2-10 Flow Controller Installation Arrangement ...................................................................................... 2-3

2-11 Purge the Gas Supply Line Before GF100 Series Installation....................................................... 2-4

2-12 Position and Mount the GF100 Series .......................................................................................... 2-5

2-13 Perform a Leak Test...................................................................................................................... 2-7

2-14 Zeroing Setup Process.................................................................................................................. 2-7

2-15 Zeroing the GF100 Series............................................................................................................. 2-7

2-15-1 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel ............................. 2-8

2-15-2 Zeroing GF100 Series Flow from LCD Display Panel ................................................................... 2-9

2-16 Performance Checks .................................................................................................................... 2-9

2-17 Introduction to the MultiFlo

TM

Configurator ...................................................................................2-10

2-18 Using the MultiFlo Configurator.................................................................................................... 2-10

2-19 Electrical Connections.................................................................................................................. 2-12

2-19-1 DeviceNet Connections................................................................................................................2-12

2-19-2 Analog/RS485 Connections ......................................................................................................... 2-13

2-19-3 EtherCat Connections .................................................................................................................. 2-14

2-20 GF135 Inlet Valve Installation....................................................................................................... 2-16

2-21 GF135 Commissioning.................................................................................................................2-17

Section 3 Operation

3-1 General ......................................................................................................................................... 3-1

3-2 Theory of Operation for Flow Measurement ................................................................................. 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview .......................................................................................................................................4-1

4-2 Maintenance.................................................................................................................................. 4-1

4-3 Troubleshooting............................................................................................................................. 4-3

4-4 Troubleshooting Checklist .............................................................................................................4-3

4-5 GF100 Series Troubleshooting Guide ........................................................................................... 4-4

Section 5 Product Description Code

5-1 Overview .......................................................................................................................................5-1

Appendix A: GF100 Series Gas Table

A-1 Overview .......................................................................................................................................A-1

Appendix B: GF100 Series Patents

B-1 Overview .......................................................................................................................................B-1

Appendix C: Essential Instructions

C-1 Overview .......................................................................................................................................C-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

ii

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Contents

Figure Page

Number Number

1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital.................................... 1-1

1-2 LCD Display ..................................................................................................................................1-7

1-3 Dimensions - GF100/GF120/GF125 Series ................................................................................. 1-15

1-4 Dimensions - GF135, DeviceNet.................................................................................................. 1-16

1-5 Dimensions - GF135, RS485 .......................................................................................................1-17

1-6 Dimensions - GF101/GF121/GF126 ............................................................................................ 1-18

1-8 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications1-19

2-1 Typical Gas Supply Arrangement with Non-PTI MFC.................................................................... 2-4

2-2 Typical Gas Supply Arrangement with PTI MFC ........................................................................... 2-4

2-3 GF100 Series Mounting Attitude Positions.................................................................................... 2-5

2-4 GF100 Series Mounted to K1 Series Substrate Blocks................................................................. 2-6

2-5 Mounting Screws Torque Pattern .................................................................................................. 2-6

2-6 Display with PSI Reading ..............................................................................................................2-8

2-7 Display Reading Zero PSI .............................................................................................................2-8

2-8 Display Set to %FS ...................................................................................................................... 2-10

2-9 % Flow Display Set to Zero .......................................................................................................... 2-10

2-10 MultiFlo Cable Adapter ................................................................................................................. 2-11

2-11 USB-RS485 Converter (214F027AAA) ........................................................................................ 2-11

2-12 Diagnostic Port Locations ............................................................................................................ 2-11

2-13 GF100 Series DeviceNet Connection ..........................................................................................2-12

2-14 GF100 Series with 9-Pin Analog Connector ................................................................................. 2-15

2-15 Analog 9-Pin Connector (M).........................................................................................................2-15

2-16 GF100 with EtherCat Communications, M8 Power Connector Location...................................... 2-14

2-17 M8 Power Connector Drawing ..................................................................................................... 2-14

2-18 GF100 Series Electrical Interface Options ...................................................................................2-15

2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines........................................... 2-16

3-1 GF100 Series Operating Principles............................................................................................... 3-2

Table Page

Number Number

1-1 Industry Standard References.......................................................................................................1-3

1-2 Terms and Acronyms ....................................................................................................................1-4

1-3 Specifications for Standard GF100/GF120/GF125 Series.............................................................1-9

1-4 Specifications for Safe Delivery System (SDS) GF120 Series..................................................... 1-10

1-3 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications ....................... 1-11

1-6 Specifications for GF135 Series...................................................................................................1-12

1-7 Specifications for GF101/GF121/GF126 Series ........................................................................... 1-13

1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications ....................... 1-14

2-1 K1 Series Fasteners......................................................................................................................2-7

2-2 K1 Substrate Torque Data .............................................................................................................2-7

2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ...................................................2-10

4-1 Environmental Factors ..................................................................................................................4-3

4-2 GF100 Series Troubleshooting Guide ...........................................................................................4-4

5-1 GF100, GF120 & GF125 Series Product Description Code..........................................................5-1

5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code ......5-3

5-3 Model GF135 Product Description Code....................................................................................... 5-4

5-4 GF101, GF121 & GF126 Series Product Description Code..........................................................5-5

5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ......5-6

A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ......................................................A-1

A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 ..................................................A-2

A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ................................................A-2

B-1 GF100 Series Patents ...................................................................................................................B-1

1-1

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

1-1 Introduction

Designed for semiconductor, MOCVD , and other gas flow control

applications that require a high purity all-metal flow path, the Brooks

GF100 Series mass flow controllers and meters deliver outstanding

performance, reliability, and flexibility. Process throughput and yield are

maximized while process costs are reduced by the GF100 Series featuring:

• Ultra fast settling time for quick start up and very rapid process steps

• MultiFlo™ gas and range configurability enabling reconfiguration without

removing device from the gas line

• An independent diagnostic/service port to troubleshoot or change flow

conditions without removing the mass flow controller from service

• Long-term stability due to extremely low wetted surface area, and

corrosion resistant Hastelloy

®

sensor and valve seat

Optional model variations including—pressure transient insensitivity (PTI)

and Safe Delivery System (SDS)

Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital

1-2 How to Use This Manual

This manual is intended to provide the user with all the information

necessary to install, operate, troubleshoot and maintain these thermal

mass flow devices. The manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A GF100 Series Gas Table

Appendix B GF100 Series Patents

Appendix C Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

1-2

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service

locations and to obtain other documents that support the GF100 Series.

Those documents include:

- Brooks MultiFlo

TM

Configurator Quick Start Manual:

X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG

- Brooks GF100 Series data sheets:

DS-TMF-GF100-Series-MFC-eng

DS-TMF-GF135-Series-MFC-eng

DS-TMF-GF121-Series-MFC-eng

DS-DPT-EtherCAT-GF100-Series-eng

1-4 Notice and Caution Statements

Warning, caution and notice statements are located throughout this manual

in the ANSI format. A WARNING statement indicates a potentially

hazardous situation which, if not avoided, COULD result in death or serious

injury. A CAUTION statement indicates a potentially hazardous situation

which, if not avoided, MAY result in minor or moderate injury. It may also be

used to alert against unsafe practices. A NOTICE statement describes

specific information that requires special attention.

1-5 Product Warranty

Product warranty information can be found on the Back Cover of this

Manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers,

and applicable warranty periods according to product group.

1-6 How to Order a GF100 Series Device

Refer to Section 5.

1-7 Industry Standard References

Refer to Table 1-1.

1-8 GF100 Series Gas Table

Refer to Appendix A.

1-9 Glossary of Terms and Acronyms

Refer to Table 1-2

1-3

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement

SEMI E12 Standard temperature and pressure

SEMI E16 Guideline for determining and describing MFC leak rates

SEMI E17 Guideline for MFC transient characteristics tests

SEMI E18 Guideline for temperature specifications of the MFC

SEMI E27 Standard for MFC and MFM linearity

SEMI E28 Guideline for pressure specifications for the MFC

SEMI E52 Practice for referencing gases used in digital MFCs

SEMI E54 Sensor actuator network connections for DeviceNet

SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs

SEMI E66 Test method for determining particle contribution by MFCs

SEMI E67 Test method for determining reliabilty of MFCs

SEMI E68 Test method for determining warm-up time of MFCs

SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs

SEMI E80 Test method for determining attitude sensitivity of MFCs

SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates

SEMI F19 Specification for the finish of the wetted surface of electro polished

216L stainless steel components

SEMI F20 Specifications for 316L stainless steel bar, extruded shapes, plate, and

investment castings for components used in ultra-high purity semi

manufacturing applications

SEMI F36 Guide for dimensions and connections of gas distribution components

SEMI F37 Method for determination of surface roughness parameters for gas

distribution system components

SEMI F44 Guideline for standardization of machined stainless steel weld fittings

SEMI F45 Guideline for standardization of machined stainless steel reducing fittings

SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity

SEMI S2 Environmental, Health and Safety Guidelines

SEMI S9 Dielectric testing

SEMI S10 Risk assessment

SEMI S12 Decontamination of fielded products

ETG.1000.2 Physical Layer service definition and protocol specification

ETG.1000.3 Data Link Layer service definition

ETG.1000.4 Data Link Layer protocol specification

ETG.1000.5 Application Layer service definition

ETG.1000.6 Application layer protocol specification

ETG.1020 EtherCAT Protocol Enhancements

ETG.2000 EtherCAT Slave Information

ETG.5001.1 Modular Device Profile - Part 1: General MDP Device Model

ETG.5003.1 Semiconductor Device profile - Part 1: Common Device Profile (CDP)

ETG.5003.2020 Specific Device Profile: Enhanced Mass Flow Controller

ETG.5003.2021 Specific Device Profile: Mass Flow Controller

ETG.5003.2022 Specific Device Profile: Mass Flow Meter

ETG.5003.2023 Specific Device Profile: Enhanced Mass Flow Meter

1-4

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Term or Acronym Definition

CSR Customer Special Requirement

CVD Chemical Vapor Deposition

DeviceNet A 5-wire local network I/O communication device

that employs a command/response

communication protocol

DSP Digital Signal Processor

EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on a

bare wafer, enabling a high-purity starting point

for building the semiconductor device.

HBD Horizontal Base Down

GF100 Series Integrated Flow Controller

F.S. Full Scale

LED Light Emitting Diode

MFC Mass Flow Controller

MultiFlo Configurator I/O communication software package that

configures gas and flow ranges

MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration within

a defined standard configuration

PID Proportional Integral Derivative Controller

PSIA Pounds per Square Inch Absolute

PSID Pounds per Square Inch Differential

PSIG Pounds per Square Inch Gauge

PTI Pressure Transient Insensitive. Reduces the

effect of pressure fluctuations in gas flow.

Applicable to GF125 only.

ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR.

HC Standard Configuration w/ Hastelloy® sensors

(to reduce reaction to corrosive gases)

S.P. Setpoint

Step Technology Enables fast set point control through a high

speed DSP and low volume drive circuit

VIU Vertical mounting attitude with inlet side facing up

Table 1-2 Terms and Acronyms

1-5

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

1-10 Description

Ultra Fast Response

The Brooks GF Series patented flow sensor combined with a high speed

ARM processor and fast acting diaphragm-free valve assembly enables:

• Faster response and settling time for improved wafer throughput

• Ultra-fast 1-2 second etch step processing

• Reduced diverted gas consumption and associated abatement costs

• Time sensitive gas delivery steps in Atomic Layer Deposition

• User programmable start-up function for processes requiring a slow

ramped gas turn-on or time critical transitions between flow rates

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in

process gas accuracy for linear and non-linear gases. This is achieved

through advanced gas modeling and optimized through actual gas testing.

Brooks MultiFlo

TM

allows the device to be quickly and easily configured for

another gas and/or flow range without sacrificing accuracy or rangability.

Selecting a new gas automatically creates a new calibration curve,

establishes optimized PID settings for dynamic control, automatically

compensates for gas density effects, and ensures smooth overshoot-free

transitions between flow rates with excellent steady-state stability. Brooks

MultiFlo technology offers unparalleled flexibility. An extensive gas

database is provided and a single device can be quickly programmed for

thousands of different gas and flow range combinations. Process benefits

achieved:

• Mass flow controller full scale full range can be rescaled down typically by a

factor of 3:1 with no impact on accuracy, turndown or leak by specifications

• Optimum process and inventory flexibility resulting in dramatically reduced

inventory costs

• Fewer configurations/bin sizes required to support many different processes

• Less down-time with rapid process recovery

MultiFlo

TM

Support References: Brooks MultiFlow Configurator Quick

Start Guide (X-SW-MultiFlo-Config-QS-eng (Part Number: 541B167AAG))

MultiFlo

TM

Configurator Accessory Kits:

778Z010ZZZ Basic MultiFlo Configurator Kit

*Software, MultiFlo Configurator

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 Converter with DB-9 female

778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and

Adapter Cables *Software, MultiFlo Configurator

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 Converter with DB-9 female

A332295001 Power Supply MFC

A332297002 Cable, Power, 9-Pin

A332297001 Cable, Power, DeviceNet

* MultiFlo Configurator Software is available on the Brooks Instrument

website at: www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

1-6

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Pressure Transient Insensitivity (PTI)— Included with all GF125 &

GF135 models

Cost and space constraints are driving gas panel designers to remove

point-of-use pressure regulators and pressure monitoring components from

the process design and rely solely on the mass flow controller to accurately

control the process under dynamic pressure conditions. The Brooks GF125

& GF135 (PTI) devices utilize a patented control algorithm that inverts the

pressure signal, compares it to the pre-fluctuation signal and drives real-

time valve position compensation to maintain stable flow. Enhanced

pressure transient is achieved through faster sensing, quicker processing,

and a reduction in internal dead-volume between the sensors and valve

orifice.

GF101/121/126 based on the same technology and design as the low

flow GF's (same sensor, same electronics, low power support)

• Smaller footprint than competitive MFC's

• Handles flow rates up to 300 slpm

• Metal seal for durability and high leak integrity

• Proprietary sensor technology

• Precise flow control with fast sub-1 second settling time

• 1% of reading accuracy

• Corrosion-resistant Hastelloy C-22 sensor tube

Optional Safe Delivery System (SDS)— GF120 model only

The Safe Delivery System (SDS) enhanced GF120 model is a state-of-the-

art low pressure drop devices for the delivery of sub atmospheric safe

delivery system gases used in Implant and Etch processes. The Brooks

GF120 SDS models are available in full scale flow ranges 4 sccm -1 slpm.

Advanced Thermal Flow Measurement Sensor

Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an

enhanced sensor manufacturing and burn in process incorporates a unique

orthogonal sensor mounting orientation to eliminate sensor drift caused by

valve heating effects and eliminates thermal siphoning effects. This unique

sensor configuration includes an optimized temperature profile for gases

prone to thermal decomposition. This design results in:

• Enhanced signal to noise performance for improved accuracy at low

set points

• Superior reproducibility at elevated temperature through new

isothermal packaging and onboard conditioning electronics with

ambient temperature sensing and compensation

• Improved long-term stability

1-7

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Figure 1-2 LCD Display

High Purity Flow Path

The Brooks GF Series has an all metal, corrosion resistant Semi F20

compliant wetted flow path with highly corrosion resistant Hastelloy C-22

valve seat and jet orifice. The GF120, GF125 & GF135 devices are

constructed with a 4μ

inch Ra max surface finish while the GF100 is

constructed with a 10μ inch Ra.

• Overall reduced surface area and un-swept volumes for faster dry-down

during purge steps

• Long-term sensor and device stability for maximum yield and throughput

Extensive Mechanical Configurations

GF Series supports all metal seal/UHP industry gas connection interface

standards for full OEM and process coverage.

• Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2"

bodies

• 124mm 4 VCR on 1-1/2" body

Enhanced Diagnostics and User Interface

The mass flow controller is one of the most complex and critical

components in gas delivery systems. When dealing with ultra-high-purity

gas distribution or highly toxic or corrosive gases, removing the mass flow

controller to assess functionality should be the last resort. Brooks GF

Series devices provide for in-line device evaluation and instantaneous

troubleshooting through:

• Embedded self test routines and independent diagnostic/service port

• High visibility LCD display with easy accessible push button for local

indication of Flow (%), Temperature (

o

C), Pressure (PSIA/kPa) and

Network Address

• Zero button to easily re-zero the device during scheduled maintenance

• Rotatable display with a push button to enable improved readability based

on how the MFC is mounted. Simply hold button down for at least 3

seconds to rotate display. This featue is standard for GF135 and GF101/

GF121/GF126 and available for GF100/GF120/GF125.

This combination of features results in limiting service interruption and

reduced downtime.

1-8

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Communication Interfaces

The GF100 Series supports analog 0-5 Vdc, RS485, DeviceNet™ and

EtherCAT

®

communication protocols. Analog connections can be accessed

via the DeviceNet or RS485 or Analog only connector options. DeviceNet

and RS485 are multi-drop connections that allow a maximum of 64 devices

for DeviceNet and 32 devices for RS485 to be connected on the same

network. Brooks Instrument’s DeviceNet profile has been certified by the

ODVA™ (Open DeviceNet Vendor’s Association). EtherCAT is an Ethernet

based communications system know for its high cycle time and cost

efficient cabling and master application solutions. The EtherCAT GF100

Series devices conform to the ETG.5003 Semiconductor Device Profile

specification. A range of low profile adapter cables facilitate replacing

previously installed devices eliminating the need to carry multiple devices

of the same gas/range but different electrical connectors.

1-11 Specifications for GF100 Series Devices

See Table 1-3 for specifications for standard GF100 Series.

See Table 1-4 for specifications for the Safe Delivery System (SDS) GF120

Series.

See Table 1-5 for specifications for standard GF100 Series-EtherCAT

See Table 1-6 for specifications for the GF135 Series.

See Table 1-7 for specifications for the GF121 Series.

See Table 1-8 for specifications for the GF121 Series-EtherCAT

See Figure 1-3 for dimensions for the GF100 Series.

See Figures 1-4 & 1-5 for dimensions for the GF135 Series.

See Figure 1-6 for dimensions for the GF121 Series.

See Figure 1-7 for dimensions for the GF100/GF121 Series-EtherCAT

1-9

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-3 Specifications for Standard GF100/GF120/GF125 Series

GF100GF100

GF100

GF120GF120

GF120

GF125GF125

GF125

Electrical Electrical

Electrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

TM

via 5-Pin “M12” connector

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Diagnostic /Service Port Diagnostic /Service Port

Diagnostic /Service Port RS485 via 2.5mm jack

Power Supply/Consumption Power Supply/Consumption

Power Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc

RS485/Analog: 6 Watts max @

+15Vdc. (+10%) or +24 Vdc (±10%)

PerformancePerformance

Performance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

22

2

Eq.) Eq.)

Eq.) 3 sccm to 55 slm

Flow AccuracyFlow Accuracy

Flow Accuracy

+1% S.P. > 35-100%, +0.35% F.S. 2-35%

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

+ 0.15% S.P.

LinearityLinearity

Linearity

+ 0.5% F.S. (included in accuracy)

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time) 300ms (3-860 sccm N2 Eq.)

Normally Closed ValveNormally Closed Valve

Normally Closed Valve < 1 sec 700ms 400ms (861-7200 sccm N2 Eq.)

500ms (7201-30000 sccm N2 Eq.)

<700ms (30001-55000 sccm N2 Eq.)

Normally Open ValveNormally Open Valve

Normally Open Valve <1.5 sec

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable

< 5% SP up to 5 psi/sec upstream press. spike

Control RangeControl Range

Control Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)

MultiFloMultiFlo

MultiFlo

standard

#of Bins#of Bins

#of Bins 11 bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) < 1% of F.S.

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Valve Shut Down (N.O. Valve) 2% of F.S.

Zero StabilityZero Stability

Zero Stability <

+ 0.5% F.S. per year

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Span: 0.05% S.P. per

o

C, Zero: 0.005% F.S. per

o

C

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range

10-50

o

C

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid

*Argon gas applications require an additional 10 psid differential pressure.

Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet

(example SiCl4). Contact Brooks Technical Support for more information.

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure

500 psia max 100 psia max

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external)

1x10

-10

atm. cc/sec He

Compliance Compliance

Compliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

NOTE: See the following Safe Delivery System (SDS) section for optional detailed specifications

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance

Viewing Angle / Viewing Distance Fixed /

10 feet

Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (

o

C), Pressure (psia, kPa) /

0.1 (unit)

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed

Normally Open

Meter (no valve)

Wetted MaterialsWetted Materials

Wetted Materials GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 4μ inch Ra (0.1 μm Ra)

1-10

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series

GF120XSLGF120XSL

GF120XSL

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

GF120XSD

GF120XSLGF120XSL

GF120XSL

*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details.

**Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details.

***Consult factory for other gases.

PerformancePerformance

Performance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

22

2

Eq.) Eq.)

Eq.) 4 - 25 sccm >25 to 1 slpm

Gases SupportedGases Supported

Gases Supported AsH

3

, PH

3

, BF

3

, SiF

4

, Ar, Xe, N

2

O, N

2

, GeF4, AsF5, PF3,

H2Se, HMDSO, HMDSN, H2O***

MultiFlo ProgrammableMultiFlo Programmable

MultiFlo Programmable Not Configurable

Flow AccuracyFlow Accuracy

Flow Accuracy +/-1% S.P.

>35% F.S. +/-0.35% F.S. <35% F.S.

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <+/- 0.15% S.P.

Zero StabilityZero Stability

Zero Stability <=0.6% F.S. per year

Settling Time (to within Settling Time (to within

Settling Time (to within

++

+

2% F.S.)2% F.S.)

2% F.S.) < 3 sec

Warm Up TimeWarm Up Time

Warm Up Time minimum of 30 minutes

Leak IntegrityLeak Integrity

Leak Integrity 1X10

-11

atm. cc/sec He

Valve Shut Down (Leaky by)Valve Shut Down (Leaky by)

Valve Shut Down (Leaky by) <1% F.S.

Operating ConditionsOperating Conditions

Operating Conditions

Minimum Operating Inlet Pressure*Minimum Operating Inlet Pressure*

Minimum Operating Inlet Pressure* 4 to 20 sccm

< 10 Torr

>20 to 50 sccm

< 20 Torr

>50 sccm to 1 slpm < 50 Torr

Maximum PressureMaximum Pressure

Maximum Pressure 500 psia max

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity

Not Available

DifferentialPressure**DifferentialPressure**

DifferentialPressure** 10 Torr-30 psid typical (1.33-207 kPa typical)

Valve ConfigurationValve Configuration

Valve Configuration Normally Closed

Ambient Temperature RangeAmbient Temperature Range

Ambient Temperature Range 10

O

C-50

O

C

Zero Temperature CoefficientZero Temperature Coefficient

Zero Temperature Coefficient Span:

0.05% SP per

O

C, Zero:

0.005% F.S. per

O

C

1-11

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications

PerformancePerformance

Performance

GF100GF100

GF100

GF120GF120

GF120

GF125GF125

GF125

GF120XSLGF120XSL

GF120XSL

GF120XSDGF120XSD

GF120XSD

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 3 sccm to 55 slm 4 sccm to 25 sccm >25 sccm to 1 slpm

Flow AccuracyFlow Accuracy

Flow Accuracy

+1% S.P. > 20-100%; +0.2% F.S. 2-20% ±1% S.P. 35-100%; ±0.35% F.S. 2-35%

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

+ 0.15% S.P.

Flow Settling Time (NC Valve)Flow Settling Time (NC Valve)

Flow Settling Time (NC Valve)

300ms (3-860 sccm N2 Eq.)

< 1 sec 700ms

400ms (861-7200 sccm N2 Eq.)

< 3 sec

500ms (7201-30000 sccm N2 Eq.)

<700ms (30001-55000 sccm N2 Eq.)

Flow Settling Time (NO Valve)Flow Settling Time (NO Valve)

Flow Settling Time (NO Valve) <1.5 sec ----------

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable < 1% S.P. up to 5 psi/sec ----------

upstream press. spike

Control RangeControl Range

Control Range 2-100% (Normally Closed Valve) 2-100% (Normally Closed Valve)

3

-100% (Normally Open Valve)

MultiFloMultiFlo

MultiFlo

Standard ----------

#of Bins#of Bins

#of Bins 11 bins ----------

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) 0.15% of F.S. <1% of F.S.

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Valve Shut Down (N.O. Valve) 2% of F.S. ----------

Zero StabilityZero Stability

Zero Stability <

+ 0.15% F.S. per year < + 0.6% F.S. per year

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Zero: 0.005% F.S. per

o

C Zero 0.005% of F.S. per °C

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

o

C

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid 10 Torr - 30 psid typical

861- 7200 sccm = 10-45 psid For more details

7201-55000 sccm = 15-45 psid consult factory

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure

500 psia max 100 psia max up to 500 psia max

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10^

-10

atm. cc/sec He

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed Normally Closed

Normally Open

Meter (no valve)

Wetted MaterialsWetted Materials

Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra 5μ inch Ra

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status LightsStatus Lights

Status Lights Run, Error, Power, Network Status

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

VV

V

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

iewing Angle / Viewing Distance

Rotatable /

10 feet

UU

U

nits Displayed / Resolutionnits Displayed / Resolution

nits Displayed / Resolution Flow (%), Temp. (

o

C), Pressure (psia, kPa) /

0.1 (unit)

Electrical Electrical

Electrical

Electrical ConnectionElectrical Connection

Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks

Digital CommunicationDigital Communication

Digital Communication EtherCAT

Diagnostic /Service PortDiagnostic /Service Port

Diagnostic /Service Port Micro-USB

Power Supply/ConsumptionPower Supply/Consumption

Power Supply/Consumption

320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)

ComplianceCompliance

Compliance

EMCEMC

EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013

Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

REACH Directive EC (1907/2006)

*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on

outlet (example SiCl4). Contact Brooks Technical Support for more information.

1-12

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-6 Specifications for GF135 Series

PP

P

erformanceerformance

erformance

Full Scale Flow Range:Full Scale Flow Range:

Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.)

Gasses Supported:Gasses Supported:

Gasses Supported: N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),

C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr), N2O, CHF3, SiH2Cl2, C5F8, He

Flow Flow

Flow

AccurAccur

Accur

acy:acy:

acy: +/-1.0% S.P. (10-100% F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10% F.S.)

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

oducibility:oducibility:

oducibility: < +/- 0.15% S.P.

Linearity:Linearity:

Linearity: Included in accuracy

Settling Settling

Settling

Time (to within +/-2% FS):Time (to within +/-2% FS):

Time (to within +/-2% FS): <300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)

PrPr

Pr

essuressur

essur

e Insensitivity:e Insensitivity:

e Insensitivity: < 1% S.P. up to 5 psi/sec upstream press. spike

ConCon

Con

trtr

tr

ol Range:ol Range:

ol Range: 1-100%

VV

V

alve Shut Down:alve Shut Down:

alve Shut Down: < 0.5% of F.S. N2

ZZ

Z

erer

er

o Stability:o Stability:

o Stability: < +/- 0.5% F.S. per year

TT

T

emperemper

emper

aturatur

atur

e Coefficiene Coefficien

e Coefficien

t:t:

t: Span: 0.05% setpoint per °C, Zero: 0.005% F.S. per °C

Rate-of-Decay PRate-of-Decay P

Rate-of-Decay P

erformance:erformance:

erformance: (ROD by default is disabled/off. It should not be enabled until after MFC is installed and properly commissioned)

Flow Rate:Flow Rate:

Flow Rate: Maximum flow rate for which an ROD measurement can be obtained is 800 sccm

T

TT

T

emperemper

emper

aturatur

atur

e Sensitivity:e Sensitivity:

e Sensitivity: +/- 0.04% S.P./Deg C

PrPr

Pr

essuressur

essur

e Sensitivity:e Sensitivity:

e Sensitivity: +/- 0.04% F.S./psi

Minimum Detectable ChangeMinimum Detectable Change

Minimum Detectable Change Zero Drift: +/- 0.02% F.S.

frfr

fr

om Commissioning Baseline:om Commissioning Baseline:

om Commissioning Baseline: Valve Leak: +0.1% F.S.

Repeatability: +/- 0.3% S.P. (SiCl4 +/- 0.5% from 5-100% S.P. up to 100 sccm flow)

RatingsRatings

Ratings

OperOper

Oper

ating ating

ating

TT

T

emperemper

emper

aturatur

atur

e Range:e Range:

e Range: 10-50°C

DifferDiffer

Differ

enen

en

tial Prtial Pr

tial Pr

essuressur

essur

e Range**:e Range**:

e Range**: 3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid

**Typical pressure drop. Actual pressure drop will be gas and flow dependent.

Argon gas applications require higher differential pressure.

Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet

(example SiCl4). Contact Brooks Technical Support for more information.

Maximum OperMaximum Oper

Maximum Oper

ating Prating Pr

ating Pr

essuressur

essur

e:e:

e: 100 psia max

Pneumatic Pneumatic

Pneumatic

VV

V

alve Operalve Oper

alve Oper

ating Prating Pr

ating Pr

essuressur

essur

e:e:

e: 43.5 psia - 72.5 psia

Leak InLeak In

Leak In

tegrity (external):tegrity (external):

tegrity (external): 1x10-10 atm. cc/sec He

MecMec

Mec

hanicalhanical

hanical

VV

V

alve alve

alve

TT

T

ype:ype:

ype: Normally Closed

WW

W

etted Materials:etted Materials:

etted Materials: SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45

Surface Finish:Surface Finish:

Surface Finish: 4μ inch Ra (0.1 μm Ra)

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Alarms:Alarms:

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,

Sensor Drift, Flow Error, Valve Leak

Display Display

Display

TT

T

ype:ype:

ype: Top Mount Electronically Rotatable Integrated LCD

Viewing Distance:Viewing Distance:

Viewing Distance: Fixed / 10 feet

Units Displayed / Resolution:Units Displayed / Resolution:

Units Displayed / Resolution: Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)

ElectricalElectrical

Electrical

Electrical Connection:Electrical Connection:

Electrical Connection: Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector

Digital Communication:Digital Communication:

Digital Communication: RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

ort:ort:

ort: RS485 via 2.5 mm jack

PP

P

ower Supply/Consumption:ower Supply/Consumption:

ower Supply/Consumption: DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,

Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%

ComplianceCompliance

Compliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EnEn

En

virvir

vir

onmenonmen

onmen

tal Compliancetal Compliance

tal Compliance RoHS Directive 2011/65/2006

Reach Directive EC 1907/2006

1-13

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-7 Specifications for GF101/GF121/GF126 Series

GF101GF101

GF101

GF121GF121

GF121

GF126GF126

GF126

PerformancePerformance

Performance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

22

2

Eq.) Eq.)

Eq.) 55 to 300 slm

Flow AccuracyFlow Accuracy

Flow Accuracy

+1% S.P. > 35-100%, +0.35% F.S. 2-35%

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

+ 0.15% S.P.

LinearityLinearity

Linearity

+ 0.5% F.S. (included in accuracy)

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time)

Normally Closed ValveNormally Closed Valve

Normally Closed Valve < 1 sec

Pressure TransducerPressure Transducer

Pressure Transducer Ability to measure inlet pressure

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

MultiFloMultiFlo

MultiFlo Standard (All typical high flow rate process gases & mixtures supported)

# of Bins# of Bins

# of Bins 4 Bins

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) < 2% of F.S. @ 30 N2 psig/atm out

Zero StabilityZero Stability

Zero Stability <

+ 0.5% F.S. per year

Temperature CoefficientTemperature Coefficient

Temperature Coefficient

Span: 0.05% S.P. per

o

C, Zero: 0.005% F.S. per

o

C

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

o

C

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 30-90 psid

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure Controller: 75 psig / Meter: 150 psig

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10

-10

atm. cc/sec He

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed

Meter (no valve)

Wetted MaterialsWetted Materials

Wetted Materials GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra (0.1 μm Ra)

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

AlarmsAlarms

Alarms Control Valve Output, Network Interruption

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance

Viewing Angle / Viewing Distance Fixed /

10 feet

Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (

o

C), Pressure (psia, kPa) /

0.1 (unit)

ElectricalElectrical

Electrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

TM

via 5-Pin “M12” connector

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Diagnostic /Service Port Diagnostic /Service Port

Diagnostic /Service Port RS485 via 2.5mm jack

Power Supply/Consumption Power Supply/Consumption

Power Supply/Consumption DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)

RS485/Analog: 6 Watts max @

+15 Vdc. (+10%) (Under typical operating conditions)

ComplianceCompliance

Compliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

1-14

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Section 1 Introduction

Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications

PerformancePerformance

Performance

GF101GF101

GF101

GF121GF121

GF121

GF126GF126

GF126

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 55 slm to 300 slm

Flow AccuracyFlow Accuracy

Flow Accuracy

+1% S.P. > 35-100%; +0.35% F.S. 2-35%

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

+ 0.15% S.P.

Response Time/Settling TimeResponse Time/Settling Time

Response Time/Settling Time < 1 sec

(NC Valve)(NC Valve)

(NC Valve)

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable Ability to measure inlet presssure

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

MultiFloMultiFlo

MultiFlo

Standard

#of Bins#of Bins

#of Bins 4 bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) <2% of F.S. @30 N2 psig/atm out

Zero StabilityZero Stability

Zero Stability <

+ 0.15% F.S. per year

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Zero: 0.005% F.S. per

o

C

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

o

C

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 30-90 psid

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure Controller: 75 psig

Meter: 150 psig

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10^

-10

atm. cc/sec He

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed

Meter (no valve)

Wetted MaterialsWetted Materials

Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status LightsStatus Lights

Status Lights Run, Error, Power, Network Status

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

VV

V

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

iewing Angle / Viewing Distance

Rotatable /

10 feet

UU

U

nits Displayed / Resolutionnits Displayed / Resolution

nits Displayed / Resolution Flow (%), Temp. (

o

C), Pressure (psia, kPa) /

0.1 (unit)

Electrical Electrical

Electrical

Electrical ConnectionElectrical Connection

Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks

Digital CommunicationDigital Communication

Digital Communication EtherCAT

Diagnostic /Service PortDiagnostic /Service Port

Diagnostic /Service Port Micro-USB

Power Supply/ConsumptionPower Supply/Consumption

Power Supply/Consumption 320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)

ComplianceCompliance

Compliance

EMCEMC

EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013

Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

REACH Directive EC (1907/2006)

Leht laadib ...

Brooks GF125 / GF126 Kasutusjuhend

See käsiraamat sobib ka

Brooks GF125 / GF126 Kasutusjuhend

teistes keeltes

Seotud paberid

Muud dokumendid