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Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Brooks

Digital MFC's & MFM's

Brooks

SLA5800 Series

Elastomer Sealed, Digital,

Thermal Mass Flow Meters and Controllers

Model SLA5850

with RS485 Communications

Model SLA5850

with DeviceNet

Communications

Model SLA5850

with Profibus

Communications

Model SLA5851

with EtherCAT

Communications

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Brooks

Digital MFC's & MFM's

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Brooks

Digital MFC's & MFM's

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their

gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Brooks

Digital MFC's & MFM's

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

Brooks

Digital MFC's & MFM's

Contents

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Paragraph Page

Number Number

Section 1 Introduction

1-1 Scope .........................................................................................................................................1-1

1-2 Purpose......................................................................................................................................1-1

1-3 Description .................................................................................................................................1-1

1-4 Specifications .............................................................................................................................1-2

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 Gas Connections........................................................................................................................2-2

2-8 In-Line Filter ...............................................................................................................................2-2

2-9 Installation ..................................................................................................................................2-3

2-10 Electrical Interface......................................................................................................................2-5

2-11 Operation Check Procedure (Analog I/O) ..................................................................................2-9

2-12 Operation Check Procedure (Digital I/O)...................................................................................2-10

2-13 Bus/Network (DeviceNet, Profibus, Foundation Fieldbus, EtherCAT).......................................2-10

Section 3 Operation

3-1 Overview ....................................................................................................................................3-1

3-2 Theory of Operation for Flow Measurement ..............................................................................3-1

3-3 Features .....................................................................................................................................3-3

3-4 Analog I/O Mode of Operation....................................................................................................3-4

3-5 Communications Features .........................................................................................................3-5

3-5-1 RS485 Communications Features (Analog versions only) .........................................................3-5

3-5-2 DeviceNet Communications Features........................................................................................3-6

3-5-3 Profibus Communications Features ...........................................................................................3-6

3-5-4 EtherCAT Communications Features.........................................................................................3-6

3-6 Alarms (Analog versions only)....................................................................................................3-7

3-6-1 Alarms (Analog versions only) Configuration Attributes .............................................................3-8

3-6-2 Diagnostic Alarms (Analog versions only) ..................................................................................3-9

3-6-3 General Alarms (Analog versions only) ......................................................................................3-9

3-7 Calibration/Configuration Sets...................................................................................................3-10

3-8 Special Features .......................................................................................................................3-10

3-8-1 Setpoint Ramping......................................................................................................................3-11

3-8-2 Low Setpoint Command Cutoff .................................................................................................3-11

3-8-3 Low Flow Output Cutoff.............................................................................................................3-11

3-8-4 Adaptive Control........................................................................................................................3-11

3-8-5 Flow Totalizer ............................................................................................................................3-11

3-9 PC-based Support Tools ...........................................................................................................3-11

Brooks

Digital MFC's & MFM's

Contents Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Section 4 Maintenance & Troubleshooting

4-1 Maintenance and Troubleshooting .............................................................................................4-1

4-1-1 Troubleshooting Analog or Digital...............................................................................................4-2

4-1-2 System Checks ..........................................................................................................................4-3

4-1-3 Cleaning Procedures..................................................................................................................4-6

4-1-4 Calibration Procedure ................................................................................................................4-6

Section A Essential Instructions ............................................................................................................ A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

Figure Page

Number Number

1-1 General Wiring ...........................................................................................................................1-6

1-2 Response Performance of Brooks Digital MFC .........................................................................1-7

1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5%

Per Second Setpoint Change.....................................................................................................1-7

1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts.................................................1-8

1-5 SLA5800 Series Profibus Connections and Pinouts ..................................................................1-9

1-6 SLA5800 Series DeviceNet Connections and Pinouts ..............................................................1-10

1-7 SLA5800 Series EtherCAT Connections and Pinouts ...............................................................1-11

1-8 Dimensions - Model SLA5850, Thru-Flow, RS485....................................................................1-12

1-9 Dimensions - Model SLA5850, Downport, RS485.....................................................................1-12

1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT ...............................................................1-13

1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet ..............................................................1-13

1-12 Dimensions - Model SLA5860, Thru-Flow, Profibus..................................................................1-14

1-13 Dimensions - Model SLA5860, Thru-Flow, RS485....................................................................1-14

1-14 Dimensions - Model SLA5861, Thru-Flow, RS485....................................................................1-15

1-15 Dimensions - Model SLA5863, Thru-Flow, DeviceNet ..............................................................1-15

1-16 Dimensions - Model SLA5853, Thru-Flow, Profibus..................................................................1-16

1-17 Dimensions - Model SLA5853, Thru-Flow, EtherCAT ...............................................................1-16

2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version .............................2-6

2-2 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ...........2-7

2-3 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ...................2-7

2-4 RS485 Multidrop Interconnection TMFs and PC........................................................................2-8

3-1 Flow Sensor Operational Diagram (VCR

End Connections Shown) .......................................3-2

3-2 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers ................................3-3

4-1 Bench Troubleshooting Circuit ...................................................................................................4-5

Tables

Table Page

Number Number

1-1 SLA5800 Series Specifications ..................................................................................................1-3

1-2 SLA5800 Series Electrical Specifications...................................................................................1-4

1-3 SLA5800 Series Certifications ...................................................................................................1-5

2-1 Recommended Filter Size..........................................................................................................2-2

4-1 Sensor Troubleshooting .............................................................................................................4-4

4-2 Troubleshooting..........................................................................................................................4-7

1-1

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

1-1 Scope

Thank you for purchasing a Brooks Instrument Mass Flow Product. This

manual, X-TMF-SLA5800-Series-RevB-MFC-eng is an installation and

operation manual for your instrument.

If you have purchased a Brooks

Digital Mass Flow Product with RS485,

DeviceNet

, Profibus

or EtherCAT

communicatons, a separate

Instruction Manual shall also be provided as part of the operating

documentation.

1-2 Purpose

The Brooks Digital Products are mass flow measurement devices

designed for accurately measuring (MFM's) and rapidly controlling (MFC's)

flows of gases. This instruction manual is intended to provide the user with

all the information necessary to install, operate and maintain the Brooks

MFC and MFM. This manual is organized into the following sections.

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance

Section A Essential Instructions

Back Cover Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these Brooks Digital products.

1-3 Description

The SLA5800 Series provides a highly configurable platform based on a

simple modular architecture. The SLA5800 Series feature set was carefully

selected to enable drop-in replacement and upgrade of many brands of

mass flow controllers. With the wide range of options and features

available, the SLA5800 Series provides users with a single platform to

support a broad range of applications.

Industrial Multi-gas/Multi-range Capabilities

The SLA5800 Series allows multi-gas and multi-range capabilities to

reduce customer inventory. Storage and pre-programming of up to 6 gas

calibrations easily permits users to switch between different gasses and

ranges on a single device

Wide Flow Range

The SLA5800 Series covers an extremely broad range of flow rates. Model

SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown

ratio of 100:1 for any full scale range from 1-50 lpm N2 equivalent and 50:1

turndown for all other flow rates, accurate gas flow can be measured or

controlled down to 0.06 ccm! Model SLA5853 can monitor or control gas

flows up to 2500 lpm

Fast Response Performance

The all-digital electronics and superior mechanical configuration in the

1-2

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

SLA5800 Series provide for ultra fast response characteristics.

Broad Array of Communication Options

Brooks offers traditional 0-5 volt and 4-20mA analog options as well as

RS485 digital communications (“S-protocol”, based on HART). Brooks also

offers control interfaces via digital network protocols like DeviceNet, a high

speed (up to 500k baud) digital communication network, Profibus and

EtherCAT. Brooks' communication capabilities and device-profiles have

been certified by the ODVA (Open DeviceNet Vendor's Association) and

the ITK (Interoperability Test Kit). Other network protocols are in

development. Talk to your Brooks representative about your specific

needs.

Advanced Thermal Flow Measurement Sensor

Brooks' sensor technology combines:

• Excellent signal to noise performance for improved accuracy at low

setpoints

• Superior long-term stability through enhanced sensor manufacturing and

burn in process

• Isothermal packaging to reduce sensitivity to external temperature

changes

• Corrosion resistant sensor flow path

Advanced Diagnostics

The mass flow controller remains the most complex and critical component

in gas delivery systems. When dealing with highly toxic or corrosive gases,

removing the mass flow controller to determine if it is faulty should be the

last resort. In response to this, Brooks pioneered smarter mass flow

controllers with embedded self test routines and introduced an

independent diagnostic/service port to provide the user with a simple

interface, for troubleshooting without disturbing flow controller operation.

1-4 Specifications (Reference Tables 1-1 and 1-2)

1-3

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Table 1-1 SLA5800 Series Specifications

SLA5850/60SLA5850/60

SLA5850/60

SLA5851/61SLA5851/61

SLA5851/61

SLA5853/63SLA5853/63

SLA5853/63

* Response time can be improved upon request

Flow Ranges and PrFlow Ranges and Pr

Flow Ranges and Pr

essuressur

essur

e Ratings:e Ratings:

e Ratings:

Mass FlowMass Flow

Mass Flow

Mass FlowMass Flow

Mass Flow

Flow RangesFlow Ranges

Flow Ranges

Pressure UnitPressure Unit

Pressure Unit

PED Module HPED Module H

PED Module H

ControllerController

Controller

MeterMeter

Meter

N2 Eq. RatingsN2 Eq. Ratings

N2 Eq. Ratings

psi/barpsi/bar

psi/bar

CategoryCategory

Category

ModelModel

Model

ModelModel

Model

Min. F.S.Min. F.S.

Min. F.S.

Max. F.S.Max. F.S.

Max. F.S.

StandardStandard

Standard

OptionalOptional

Optional

SLA5850 SLA5860 0.003 50 lpm 1500 psi/103 bar 4500 psi/310 bar SEP

SLA5851 SLA5861 15 200 lpm* 1500 psi/103 bar NA** SEP

SLA5853 SLA5863 100 2500 lpm 1000 psi/70 bar NA 1 for all 150 lb flanges

2 for all other connections

* 600 lpm of H2 possible with decreased accuracy ** 4500 psi/310 bar available as a special on the SLA5861 only

> 40 psig inlet required for flows greater than 100 lpm.

* Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.

** Hazardous area certifications have a temperature range limitation of 0-65°C.

PerformancePerformance

Performance

Flow AccuracyFlow Accuracy

Flow Accuracy

+0.9% of S.P. (20-100% F.S.), ±0.9% of S.P. (20-100% F.S.),

+0.18% of F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)

±0.18% of F.S. (2-20% F.S.) up to 1100 lpm

±1.0% of F.S. from 1100 lpm

up to 2500 lpm

Control RangeControl Range

Control Range

100:1 for F.S. from 1-50 lpm (50:1 for all other F.S. flows)

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility 0.20% S.P.

LinearityLinearity

Linearity Included in accuracy

Response Time (Response Time (

Response Time (

Settling Time withinSettling Time within

Settling Time within < 1 second < 3 seconds

±2% F.S. for 0-100% command step)*±2% F.S. for 0-100% command step)*

±2% F.S. for 0-100% command step)*

Zero StabilityZero Stability

Zero Stability <

+ 0.2% F.S. per year

Temperature CoefficientTemperature Coefficient

Temperature Coefficient

Zero: <0.05% of F.S. per °C. Span: <0.1% of S.P. per °C

Pressure CoefficientPressure Coefficient

Pressure Coefficient ±0.03% per psi (0-200 psi N2)

Attitude SensitivityAttitude Sensitivity

Attitude Sensitivity

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range -14 to 65

C (7 to 149

F)**

Minimum Pressure DifferentialMinimum Pressure Differential

Minimum Pressure Differential 5 psi/0.35 bar 10 psi/0.69 bar Min.: 7.5 psi/0.52 bar at 500 lpm

(Controllers)(Controllers)

(Controllers) Min.: 14.5 psi/1.00 bar at 1000 lpm

Min.: 35.0 psi/2.41 bar at 2500 lpm

Maximum Pressure DifferentialMaximum Pressure Differential

Maximum Pressure Differential Application specific up to 50 psi/3.45 bar 300 psi/20.0 bar

(Controllers)(Controllers)

(Controllers) 1500 psi/103.4 bar

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10

-9

atm. cc/sec He

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed, Normally Open, Meter

Primary Wetted MaterialsPrimary Wetted Materials

Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton

fluoroelastomers, Buna-N, Kalrez

, Teflon

/Kalrez

, and EPDM

DiagnosticsDiagnostics

Diagnostics

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Alarms*Alarms*

Alarms*

Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service PortDiagnostic/Service Port

Diagnostic/Service Port RS485 via 2.5mm jack

1-4

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Table 1-2 SLA5800 Series Electrical Specifications

Communication ProtocolCommunication Protocol

Communication Protocol

RS485RS485

RS485

ProfibusProfibus

Profibus

®®

DeviceNetDeviceNet

DeviceNet

TMTM

EtherCATEtherCAT

EtherCAT

®®

Electrical ConnectionElectrical Connection

Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with

(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut

Sub-D (B) 2 x RJ45

Analog I/OAnalog I/O

Analog I/O 0-5 V, 1-5 V, 0-10 V, N/A 0-5V

0-20 mA, 4-20 mA

Power Max./PurgePower Max./Purge

Power Max./Purge From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to

+27 Vdc +25 Vdc +27 Vdc

Power Requirements Watts, Max.Power Requirements Watts, Max.

Power Requirements Watts, Max. Valve Orifice > 0.032”: 8 W Valve Orifice > 0.032”: 10 W Valve Orifice > 0.032”: 8.5 W

Valve Orifice ≤ 0.032”: 5 W Valve Orifice ≤ 0.032”: 7 W Valve Orifice ≤ 0.032”: 5.5 W

Without Valve: 2 W Without Valve: 4 W Without Valve: 2.5 W

Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications

Voltage Set Point Input Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A N/A

Full RangeFull Range

Full Range (-0.5)-11 Vdc N/A N/A

Absolute Max.Absolute Max.

Absolute Max. 18 V (without damage) N/A N/A

Input ImpedenceInput Impedence

Input Impedence >990 kOhms N/A N/A

Required Max. Sink CurrentRequired Max. Sink Current

Required Max. Sink Current 0.002 mA N/A N/A

Current Set Point Input SpecificationsCurrent Set Point Input Specifications

Current Set Point Input Specifications

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A N/A

Full RangeFull Range

Full Range 0-22 mA N/A N/A

Absolute Max.Absolute Max.

Absolute Max. 24 mA (without damage) N/A N/A

Input ImpedenceInput Impedence

Input Impedence 100 Ohms N/A N/A

Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications

Flow Output (Voltage) Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A N/A

Full RangeFull Range

Full Range (-1)-11 Vdc N/A N/A

Min Load ResistanceMin Load Resistance

Min Load Resistance 2 kOhms N/A N/A

Flow Output (Current) SpecificationsFlow Output (Current) Specifications

Flow Output (Current) Specifications

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A N/A

Full RangeFull Range

Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A

Max. LoadMax. Load

Max. Load 380 Ohms (for supply voltage: < 16 Vdc) N/A N/A

Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*

Analog I/O Alarm Ouput*

TypeType

Type Open Collector N/A N/A

Max. Closed (On) CurrentMax. Closed (On) Current

Max. Closed (On) Current 25 mA N/A N/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μA N/A N/A

Max. Open (Off) VoltageMax. Open (Off) Voltage

Max. Open (Off) Voltage 30 Vdc N/A N/A

Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**

Analog I/O Valve Override Signal Specifications**

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A N/A

VOR < 0.3 VdcVOR < 0.3 Vdc

VOR < 0.3 Vdc Valve Closed N/A N/A

1 Vdc < VOR < 4 Vdc1 Vdc < VOR < 4 Vdc

1 Vdc < VOR < 4 Vdc Valve Normal N/A N/A

VOR > 4.8 VdcVOR > 4.8 Vdc

VOR > 4.8 Vdc Valve Open N/A N/A

Input Impedence

Input ImpedenceInput Impedence

Input Impedence 800 kOhms N/A N/A

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input

(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A

*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.

The Alarm Output may be set to indicate any one of various alarm conditions.

** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the

valve based upon the measured reading as shown in this section.

1-5

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Mark Agency Certification

Applicable

Standard Details

(Recogonized)

Class I, Div 2, Group A, B, C, D

Class I, Zone 2, IIC T4

Class II, Zone 22

UL & CSA

Standards E73889 Vol 3, Sec 4

ATEX

II 3 G Ex nA IIC T4 Gc EN60079-0:2012

EN 60079-15:2010 KEMA 04ATEX 1118X

IECEx

II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011

IEC 60079-15:2010 IECEx DEK 14.0072X

KOSHA Ex nA IIC T4

15-AV4BO-0641

15-AV4BO-0640

EMC Directive 2014/30/EU

Directive 2011/65/EU

EN:61326-1:2013 EMC

RoHS

*ATEX/IECEx Special Conditions for safe use:

1. The module shall be installed in a suitable enclosure providing a degree of protection of

at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental

conditions under which the equipment will be used.

2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry

point, or 80 °C at the branching point of the conductors, the temperature specification of

the selected cable shall be in compliance with the actual measured temperature values.

3. Provisions shall be made to prevent the rated voltage from being exceeded by transient

disturbances of more than 40%.

4. The equipment shall only be used in an area of not more than pollution degree 2, as

defined in IEC 60664-1.

Reference Conditions

Due to effects of pressure and temperature on the compressibility of

gases, specific reference conditions must be used when reporting

volumetric flow rates in mass flow terms. For example, the unit of measure

SCCM (standard cubic centimeters per minute) refers to a volumetric gas

flow at a standard reference condition, NOT the actual volumetric gas flow

at the actual operating pressure and temperature. The key point is that the

MASS FLOW of the gas is fixed, but the reference volumetric flow can be

reported differently based upon the standard reference condition used in

the calculation.

Throughout the world, there are differences in terminology when describing

reference conditions for gases. The words “normal conditions” and

“standard conditions” are sometimes used interchangeably to describe the

reference STP (Standard Temperature and Pressure) for gases. Further

note that temperature and pressure values for standard or normal

reference conditions vary in countries and industries worldwide. For

example, the Semiconductor Equipment Manufacturing Industry (SEMI)

defines standard temperature and pressure conditions as 273.15 K (0 °C)

and 101,325 Pa (760 torr). The main concern is that no matter what words

are used for descriptive purposes, a gas mass flow rate must have a

defined standard pressure and temperature reference condition when

performing a volumetric conversion.

Table 1-3 SLA5800 Series Certifications

1-6

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Fast Response Performance

The curves in Figure 1-2 depict the MFC output signal and actual

transitional flow to steady-state when gas flow enters into process

chamber, under a step response command condition.

Brooks devices also feature adaptive (optimized) PID control, including fast

response. and linear ramp-up and/or ramp-down control characteristics.

Calibration Selection

Select one of 6 calibrations via Brooks Expert Support Tool (BEST) or

digital signal (See communications protocol for your digital coms). Analog

devices can be switched via voltage signals to Pin 11 & 8 on Firmware

Version 1.18 & newer.

Selectable Soft Start

Processes requiring injection of gases can be adversely affected by

excessive initial gas flow. This abrupt injection of gas can result in process

damage from explosion or initial pressure impact. These problems are

virtually eliminated with the soft start feature.

Figure 1-1 General Wiring

PC-based Support Tools

Brooks Instrument offers a variety of PC-based process control and service

tools to meet the needs of our customers. Smart Interface may be used with

any unit supporting RS485 S-Protocol in a multidrop configuration, thus

allowing users to control and monitor their Brooks devices. The Brooks

Expert Support Tool (BEST) may be used to monitor, diagnose, tune and

calibrate Brooks devices equipped with DeviceNet communications. The

Brooks Expert Support Tool interfaces with Brooks products via a special

service port.

1-7

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Figure 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change

Figure 1-2 Response Performance of Brooks Digital MFC

Linear ramp-up or ramp-up/down (Figure 1-3) set by user via software

tools or digital commands.

Linear ramp-up/ramp-down is adjustable at 200% per second down to

0.5% per second setpoint change.

1-8

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

RS485 Communications

The Brooks Digital Series is equipped with RS485 communication

capability. Refer to Figure 1-4 (Analog I/O pin connections), that enables

the device to communicate via a personal computer for process control.

Baud rate selections for the Brooks Digital Series related to RS485 are:

1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via

the Brooks Expert Support Tool (BEST) .

The RS485 is essentially a multidrop connection. It allows a maximum of

32 devices to be connected to a computer system. Personal computers are

not equipped with RS485 ports as standard. An RS232/USB to RS485

converter or RS485 interface board is therefore required to connect an

RS485 network to a standard personal computer. The RS485 bus, a daisy

chain network, meaning that the wires are connected at the units as in Figure 1-1.

Figure 1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts

Function PIN

Setpoint: Common Input (-) 1

Flow Signal: 0(1) -5 Vdc, 0-10 Vdc (Option), Output (+) 2

TTL Alarm: Open collector, Output (+) 3

Flow Signal: 0(4)-20 mA, Output (+) 4

Power Supply: +13.5 Vdc to +27 Vdc(+) 5

Not Connected 6

Setpoint: 0(4)-20 mA, Input (+) 7

Setpoint: 0(1)-5 Vdc, 0-10 Vdc, Input (+) 8

Power Supply: Common (-) 9

Flow Signal: Common, Output, (-) 10

Not Connected 11

Valve Override: Input 12

Auxilliary: RT Input, 0-5 Vdc, 0-10 Vdc, Input (+) 13

RS-485: Common B (-) 14

RS-485: Common A (+) 15

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

1-9

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Figure 1-5 SLA5800 Series Profibus Connections and Pinouts

Profibus Communications

The Brooks SLA5800 is now equipped to support the Profibus

communication protocol. Profibus is a fieldbus-based automation

standard of Profibus and Profinet International (PI). Via a single bus

cable, Profibus links controller or control systems with decentralized field

devices (sensors and actuators) on the field level and also enables

consistent data exchange with higher ranking communication systems. A

9-pin sub-D connector is included on every device and is galvanic

isolated from the main electronics as defined by the EN 50170 Profibus

standard to allow easy network connection separate from the main

connector. The main 15-pin sub-D connector or termination board is still

needed for the power supply, but also allows for the standard analog I/O

signals, analog valve override, and (open-collector) alarm signaling to be

used separate from the network connection.

The communication electronics allows for automatic baud rate detection

ranging from 9600 baud to 12 Mbaud, thus making the need for any

hardware baud rate selection methods not required. For selecting the

device address, which must be unique on the network, two rotary

switches are provided. This allows a user to easily select any address

number ranging from 0 to 126. This can provide fast device replacement

without complex network configurations. The Profibus-DP piggyback

board is equipped with a zero command pushbutton, allowing the user to

give a manual command to the device to (re)balance the flow sensor

electronics. This command can also be issued through the protocol.

The Profibus-DP communication option supports the following message types:

• Cyclic data exchange (Write/Read data).

• Read inputs (e.g. status, flow, temperature, totalizer, etc.).

• Read outputs (e.g. commands, setpoint).

• Global control commands (e.g. fail safe, sync).

• Get configuration (i.e. read number of I/O bytes and composition).

• Read diagnostics information (i.e. get error and alarm status).

• Set parameters (i.e. select gas number, engineering units, I/O configuration

• Set parameters (i.e. select gas number, engineering units, I/O

configuration etc.).

• Check configuration (i.e. check I/O composition).

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

1-10

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

DeviceNet Communications

The Brooks SLA5800 Digital Series is also available with DeviceNet

communication capability. DeviceNet is an open digital protocol capable of

high speeds and easy system connectivity. Brooks Instrument has several

of its devices available on this popular networking standard, and is a

member of ODVA

(Open DeviceNet Vendors Association), the governing

standard body for DeviceNet.

DeviceNet

is similar to the RS485 standard in that it is a multi-drop connection

that allows a maximum of 64 devices to be connected on the same network.

Baud rate selections for DeviceNet

products are 125K, 250K and 500K and

can be selected via a rate switch mounted on the device.

The DeviceNet

communication link also provides access to many of the

Brooks SLAMf Digital Series functions for “control and monitor” operations,

including:

• Accurate setpoint adjustment and flow output measurement (including

units of measure selection)

• PID Settings (controller only)

• Valve Override (controller only)

• Calibration Gas Select

• Soft Start Control (controller only)

Figure 1-6 SLA5800 Series DeviceNet Connection and Pinouts

1-11

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

EtherCAT Communications

Brooks lnstrument now introduces the state-of-the-art EtherCAT

communications interface on its SLA Enhanced Series platform.

Many applications of Flow Controllers/Meters are moving to increase the

use of automation. Automation comes in many forms including Ethernet

based field buses. Digital communications from these varied systems and

the devices they measure and control, are a very effective means of not

only accomplishing more effective and rapid system integration, but also

providing greatly improved system diagnostics and maintainability.

EtherCAT is an Ethernet based communication system and is known for its

high cycle time and cost efficient cabling and master application solutions.

The available physical interfaces on the EtherCAT device are listed below:

• 5 pin M8 threaded male connector for power and Analog l/O, indicated by “pwr”.

• ln and Out ports with RJ-45 connectors.

• 2.5mm female jack for RS485 diagnostic port indicated by “DlAG” (refer

to the SLA 5800 Series installation and operation manual for more details)

The EtherCAT communication option supports the following message types:

• Cyclic data exchange (Read/Write data)

• Read lnputs (e.g. status, flow, temperature, actuator drive value, etc.)

• Read Outputs (e.g. commands, setpoint, actuator override, etc.)

• Read Diagnostics information (warning & alarm status)

• Check Device configuration

• Calibration due status

• Hardware/Software versions etc.

Figure 1-7 SLA5800 Series EtherCAT Connection and Pinouts

1-12

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Figure1-8 Dimensions - Model SLA5850, Thru-Flow, RS485

Figure 1-9 Dimensions - Model SLA5850, Downport, RS485

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

1-13

Section 1 Introduction

Brooks

Digital MFC's & MFM's

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Figure 1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT

Figure 1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Note: Aux Input is used for Remote Transducer Pressure Controllers only.

1-14

Brooks

Digital MFC's & MFM's

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG

January, 2017

Figure 1-12 Dimensions - Model SLA5860, Thru-Flow, Profibus

Figure 1-13 Dimensions - Model SLA5860, Thru-Flow, RS485

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

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