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See käsiraamat sobib ka

SLA5810 / SLA5820 / SLA5840

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Models SLA5810/20 and SLAMf10/20

Brooks

Digital

Elastomer Sealed Pressure Controllers

Models SLA5810/20 and SLAMf10/20

Model SLA5810/20

Model SLAMf10/20

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Models SLA5810/20 and SLAMf10/20

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Models SLA5810/20 and SLAMf10/20

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their

gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Models SLA5810/20 and SLAMf10/20

THIS PAGE WAS

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Contents

Installation and Operation Manual

X-PR-SLA5800-SLAMF-Series.RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Models SLA5810/20 and SLAMf10/20

Paragraph Page

Number Number

Section 1 Introduction

1-1 Scope .........................................................................................................................................1-1

1-2 Purpose......................................................................................................................................1-1

1-3 Description .................................................................................................................................1-1

1-4 Specifications .............................................................................................................................1-2

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 Gas Connections........................................................................................................................2-2

2-8 In-Line Filter ...............................................................................................................................2-2

2-9 Installation ..................................................................................................................................2-3

2-10 Electrical Interface......................................................................................................................2-4

Section 3 Operation

3-1 Overview ....................................................................................................................................3-1

3-2 Theory of Operation for Pressure Control ..................................................................................3-1

3-3 Features .....................................................................................................................................3-1

3-4 Analog I/O Mode of Operation....................................................................................................3-3

3-5 Communications Features .........................................................................................................3-4

3-5-1 RS485 Communications Features .............................................................................................3-4

3-5-2 Profibus Communications Features ...........................................................................................3-5

3-5-2 DeviceNet Communications Features........................................................................................3-5

Section 4 Maintenance & Troubleshooting

4-1 Overview ....................................................................................................................................4-1

4-2 Troubleshooting..........................................................................................................................4-1

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Contents

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Models SLA5810/20 and SLAMf10/20

Figures

Figure Page

Number Number

1-1 Typical Configurations................................................................................................................1-7

1-2 SLA5810/20 and SLAMf10/20 Analog/RS485 Connections and Pinouts ...................................1-7

1-3 SLA5810/20 and SLAMf10/20 Profbus Connections and Pinouts..............................................1-8

1-4 SLA5810/20 and SLAMf10/20 DeviceNet Connections and Pinouts..........................................1-9

1-5 Dimensions - Models SLA5810/20, Thru-Flow, RS485 .............................................................1-10

1-6 Dimensions - Models SLA5810/20, Thru-Flow, Profibus ...........................................................1-10

1-7 Dimensions - Models SLA5810/20, Thru-Flow, DeviceNet........................................................ 1-11

1-8 Dimensions - Models SLAMf10/20, Thru-Flow, RS485 .............................................................1-11

1-9 Dimensions - Models SLAMf10/20, Thru-Flow, Profibus...........................................................1-12

1-10 Dimensions - Models SLAMf10/20, Thru-Flow, DeviceNet .......................................................1-12

2-1 Shielded Cable Hookup Diagram - Analog/RS485 ..................................................................... 2-5

2-2 Shielded Cable Hookup Diagram - Profibus...............................................................................2-5

2-3 Shielded Cable Hookup Diagram - DeviceNet ...........................................................................2-6

2-4 Common Electrical Hookups Voltage I/O Version ......................................................................2-6

2-5 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)......2-7

2-6 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) .............2-7

3-1 Model SLA5810/20 System Block Diagram (Downstream version) ...........................................3-2

3-2 Externally Accessible Adjustment for all SLA5810/20 Controllers..............................................3-3

4-1 Bench Troubleshooting Circuit ...................................................................................................4-3

Tables

Table Page

Number Number

1-1 Flow Ranges and Pressure Ratings...........................................................................................1-3

1-2 Specifications .............................................................................................................................1-3

1-3 Communication Protocols ..........................................................................................................1-4

1-4 Certifications SLA58XX..............................................................................................................1-5

1-5 Certifications SLAMfXX..............................................................................................................1-6

2-1 Recommended Filter Size..........................................................................................................2-2

1-1

Models SLA5810/20 amd SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

1-1 Scope

Thank you for purchasing a Brooks Instrument Digital Pressure Product. This

manual, X-PR-SLA5800-SLAMf-Series-RevB-PC-eng is an installation and

operation manual for your instrument.

If you have purchased a Brooks

Digital Mass Flow Product with DeviceNet

or Profibus

Communications, a separate Instruction Manual shall also be

provided as part of the operating documentation.

1-2 Purpose

The Brooks models SLA5810/20 and SLAMf10/20 are pressure

measurement devices designed for accurately measuring and rapidly

controlling the upstream or downstream pressure in a flow system. This

instruction manual is intended to provide the user with all the information

necessary to install, operate and maintain the Brooks

PC. This manual is

organized into the following sections.

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance & Troubleshooting

Section A Essential Instructions

Back Cover Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting to

operate or repair these Digital products.

1-3 Description

Brooks Instrument’s digital elastomer sealed pressure measurement and

control product line offers unparalleled flexibility and performance. The

SLA5800/SLAMf Series of Elastomer Seal pressure measurement and

control devices are the most accurate, repeatable, and responsive controller

on the market today!

Brooks offers traditional analog options as well as RS485 digital

communications (“S-protocol”, based on HART). Brooks also offers control

interfaces via digital network protocols like DeviceNet, a high speed (up to

500k baud) digital communication network, and Profibus. Brooks'

communication capabilities and device-profiles have been certified by the

ODVA (Open DeviceNet Vendor's Association) and the ITK (Interoperability

Test Kit). Other network protocols are in development. Talk to your Brooks

representative about your specific needs.

The process and command data may be 'wired' either using traditional 5 volt

analog connections or digital communications networks; The measurement

and control performance is the same!

The SLA5800/SLAMF Series microprocessor uses a multi-point calibration to

deal with any residual integral sensor non-linearity, yielding a highly accurate

process signal.

The SLA5800/SLAMf Series family of products utilizes a modular system in

1-2

Models SLA5810/20 and SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

both it's mechanical and electrical construction. This modularity allows for

simplified customer ordering and factory configuration, enabling Brooks to

easily meet the ever changing needs of our global customers.

This flexibility yields products for pressure measurement and control, using

either traditional analog connections or leading edge network-communication

protocols.

Brooks SLA5800 and SLAMf Series of pressure controllers can directly

replace existing analog pressure controllers with the advantage of improved

digital accuracy. Both analog and digital applications will see settling time

and accuracy improvements.

1-4 Specifications

PC-based Support Tools

Brooks Instrument offers a variety of PC-based process control and service

tools to meet the needs of our customers. SmartDDE may be used with any

unit supporting RS485 in a multidrop configuration, thus allowing users to

control and monitor their Brooks devices. The Brooks Expert Support Tool

may be used to monitor, diagnose and tune SLA Enhanced Pressure

Controllers. The Brooks Expert Support Tool interfaces with the SLA

Enhanced Pressure Controllers via a service diagnostic port located on the

top lid of the device (SLA58XX) or just inside the top cover (SLAMf).

1-3

Models SLA5810/20 amd SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Table 1-1 Flow Ranges and Pressure Ratings

Table 1-2 Specifications

*Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.

**Hazardous area certifications have a temperature range limitation of 0-65°C.

PerformancePerformance

Performance

Pressure AccuracyPressure Accuracy

Pressure Accuracy

+0.25% of Transducer F.S., F.S. > 300 psia

(Including Linearity and Hysteresis)(Including Linearity and Hysteresis)

(Including Linearity and Hysteresis)

+0.12% of Transducer F.S., F.S. ≤ 300 psia

Flow Accuracy (N2 equivalent)Flow Accuracy (N2 equivalent)

Flow Accuracy (N2 equivalent) N/A

Control RangeControl Range

Control Range 20:1 Typical - Application specific

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility 0.20% S.P.

LinearityLinearity

Linearity Included in accuracy

Response Time (Response Time (

Response Time (

Settling time withinSettling time within

Settling time within System dependent

±2% F.S. for 0-100% command step)±2% F.S. for 0-100% command step)

±2% F.S. for 0-100% command step)

Zero StabilityZero Stability

Zero Stability <

+ 0.001% F.S. per 30 days

Temperature CoefficientTemperature Coefficient

Temperature Coefficient ±0.1% of F.S. per °C

Pressure CoefficientPressure Coefficient

Pressure Coefficient N/A

(Flow Measurement Only)(Flow Measurement Only)

(Flow Measurement Only)

Attitude SensitivityAttitude Sensitivity

Attitude Sensitivity The accuracy of the Pressure Sensor is not attitude dependent

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range -14 to 65

C (7 to 149

F)**

Transducer Pressure RatingsTransducer Pressure Ratings

Transducer Pressure Ratings 15 psia/1.03 bara for < 15 psia full scale

15 psig/1.03 barg for < 15 psig full scale

100 psia/6.9 bara for < 100 psia full scale

100 psig/6.9 barg for 15-100 psig full scale

300 psia/20.7 bara for 100-300 psia full scale

300 psig/20.7 barg for 100-300 psig full scale

3000 psia/206.9 bara for 300-3000 psia full scale

4500 psia/310.3 bara for 3000-4500 psia full scale

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10

-9

atm. cc/sec He

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed, Normally Open

Primary Wetted MaterialsPrimary Wetted Materials

Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton

fluoroelastomers.

Optional Buna-N, Kalrez

, Teflon

/Kalrez

, and EPDM

DiagnosticsDiagnostics

Diagnostics

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Alarms*Alarms*

Alarms*

Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service PortDiagnostic/Service Port

Diagnostic/Service Port

RS485 via 2.5 mm jack (Located under the top cover in SLAMf version)

SLA58510/20 & SLAMf10/20SLA58510/20 & SLAMf10/20

SLA58510/20 & SLAMf10/20

Flow Ranges and PrFlow Ranges and Pr

Flow Ranges and Pr

essuressur

essur

e Ratings:e Ratings:

e Ratings:

Pressure ControllerPressure Controller

Pressure Controller

Pressure ControllerPressure Controller

Pressure Controller

Flow RangesFlow Ranges

Flow Ranges

MinimumMinimum

Minimum

MaximumMaximum

Maximum

Pressure EquipmentPressure Equipment

Pressure Equipment

ModelModel

Model

Control ModeControl Mode

Control Mode

N2 Eq. Ratings (lpm) N2 Eq. Ratings (lpm)

N2 Eq. Ratings (lpm)

Full Scale PressureFull Scale Pressure

Full Scale Pressure

Full Scale PressureFull Scale Pressure

Full Scale Pressure

Directive (PED)Directive (PED)

Directive (PED)

Min. F.S.Min. F.S.

Min. F.S.

Max. F.S.Max. F.S.

Max. F.S.

StandardStandard

Standard

StandardStandard

Standard

Module H CategoryModule H Category

Module H Category

SLA5810/SLAMf10 Downstream 0.003 50* 1 psi 1500 psia/103 bara Sound Engineering

(Pressure Regulator) 0.1 10 1500 psi 4500 psia/310 bara Practices (SEP)

SLA5820/SLAMf20 Upstream 0.003 50* 1 psi 1500 psia/103 bara Sound Engineering

(Back Pressure Regulator) 0.1 10 1500 psi 4500 psia/310 bara Practices (SEP)

* Consult sales agent or Brooks Instrument for flow limitations < 10 psi F.S. pressure

1-4

Models SLA5810/20 and SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Communication ProtocolCommunication Protocol

Communication Protocol

RS485RS485

RS485

ProfibusProfibus

Profibus

®®

DeviceNetDeviceNet

DeviceNet

®®

******

***

Electrical Connection (SLA58xx)Electrical Connection (SLA58xx)

Electrical Connection (SLA58xx) 1 x 15-pin Male Sub-D, (A) 1 x 15-pin Male Sub-D 1 M12 with threaded

1 x 9-pin Female Sub-D coupling nut (B)

Electrical Connection (SLAMf)Electrical Connection (SLAMf)

Electrical Connection (SLAMf) PG11 Cable Gland, 1/2” NPT (F) Conduit, M20 x 1.5 Conduit N/A

Analog I/OAnalog I/O

Analog I/O 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA N/A

Power Max./PurgePower Max./Purge

Power Max./Purge From +13.5 Vdc to +27 Vdc From +11 Vdc to +25 Vdc

Power Requirements Watts, Max.Power Requirements Watts, Max.

Power Requirements Watts, Max. Valve Orifice > 0.032”: 8.7 Watts Valve Orifice > 0.032”: 10 Watts

Valve Orifice ≤ 0.032”: 5.2 Watts Valve Orifice ≤ 0.032”: 7 Watts

Without Valve: 2 Watts Without Valve: 4 Watts

Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications

Voltage Set Point Input Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A

Full RangeFull Range

Full Range (-0.5)-11 Vdc N/A

Absolute Max.Absolute Max.

Absolute Max. 18 V (without damage) N/A

Input ImpedenceInput Impedence

Input Impedence >990 kOhms N/A

Current Set Point Input SpecificationsCurrent Set Point Input Specifications

Current Set Point Input Specifications

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A

Full RangeFull Range

Full Range 0-22 mA N/A

Absolute Max.Absolute Max.

Absolute Max. 24 mA (without damage) N/A

Input ImpedenceInput Impedence

Input Impedence 100 Ohms N/A

Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications

Flow Output (Voltage) Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A

Full RangeFull Range

Full Range (-1)-11 Vdc N/A

Min Load ResistanceMin Load Resistance

Min Load Resistance 2 kOhms N/A

Flow Output (Current) SpecificationsFlow Output (Current) Specifications

Flow Output (Current) Specifications

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A

Full RangeFull Range

Full Range 0-22 mA N/A

Max. LoadMax. Load

Max. Load 380 Ohms N/A

Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*

Analog I/O Alarm Ouput*

TypeType

Type Open Collector N/A

Max. Closed (On) CurrentMax. Closed (On) Current

Max. Closed (On) Current 25 mA N/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μA N/A

Max. Open (Off) VoltageMax. Open (Off) Voltage

Max. Open (Off) Voltage 30 Vdc N/A

Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**

Analog I/O Valve Override Signal Specifications**

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A

VOR < 0.3 VdcVOR < 0.3 Vdc

VOR < 0.3 Vdc Valve Closed N/A

0.3 Vdc < VOR < 4.8 Vdc0.3 Vdc < VOR < 4.8 Vdc

0.3 Vdc < VOR < 4.8 Vdc Undefined N/A

VOR > 4.8 VdcVOR > 4.8 Vdc

VOR > 4.8 Vdc Valve Open N/A

Input ImpedenceInput Impedence

Input Impedence

Input Impedence 60 kOhms N/A

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage) N/A

*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.

The Alarm Output may be set to indicate any one of various alarm conditions.

** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the

valve based upon the measured reading as shown in this section.

*** Available on SLA5810/20/40 only.

Table 1-3 Communication Protocols

1-5

Models SLA5810/20 amd SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Table 1-4 Certifications - SLA58XX

Mark Agency Certification

Applicable

Standard Details

(Recogonized)

Class I, Div 2, Group A, B, C, D

Class I, Zone 2, IIC T4

Class II, Zone 22

UL & CSA

Standards E73889 Vol 3, Sec 4

ATEX

II 3 G Ex nA IIC T4 Gc EN60079-0:2012

EN 60079-15:2010 KEMA 04ATEX 1118X

IECEx

II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011

IEC 60079-15:2010 IECEx DEK 14.0072X

KOSHA Ex nA IIC T4

15-AV4BO-0641

15-AV4BO-0640

EMC Directive 2014/30/EU

Directive 2011/65/EU

EN:61326-1:2013 EMC

RoHS

*ATEX/IECEx Special Conditions for safe use:

1. The module shall be installed in a suitable enclosure providing a degree of protection of

at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental

conditions under which the equipment will be used.

2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry

point, or 80 °C at the branching point of the conductors, the temperature specification of

the selected cable shall be in compliance with the actual measured temperature values.

3. Provisions shall be made to prevent the rated voltage from being exceeded by transient

disturbances of more than 40%.

4. The equipment shall only be used in an area of not more than pollution degree 2, as

defined in IEC 60664-1.

1-6

Models SLA5810/20 and SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Mark Agency Certification Applicable Standard Details

(Recogonized)

Class I, Div 2, Group A, B, C, D

Class I, Zone 2, IIC T4

Class II, Zone 22 IP66 UL & CSA Standards E73889 Vol 3, Sec 4

UL (Listed)

Class I, Div 2, Group A, B, C, D

Class I, Zone 2, IIC T4

Class II, Zone 22 IP66 UL & CSA Standards E73889 Vol 1, Sec 25

ATEX

II 3 G Ex nA IIC T4 Gc

II 3 D Ex tc IIIC T 85

C Dc

IP66

EN60079Ͳ0:2012+

A11:2013

EN60079Ͳ15:2010

EN60079Ͳ31:2014

KEMA 04ATEX1290 X

IECEx

Ex nA IIC T4 Gc

Ex tc IIIC T 85

C Dc

IP66

IEC60079Ͳ0:2011+

Corr.2012+Cor.2013

IEC60079Ͳ15:2010

IEC60079Ͳ31:2013

IEC KEM 07.0043X

KOSHA

Ex nA IIC T4

Ex tD A22 IP66 T85

TheMinistryof

EmploymentandLabor

NoticeNo.2013Ͳ34

Article34oftheIndustrial

SafetyandHealth



15-AV4BO-0638

15-AV4BO-0639

16-AV4BO-0328X

16-AV4BO-0327X

CE EMC Directive 2014/30/EU

Directive 2011/65/EU

EN:61326-1:2013 EMC

RoHS

ATEX Special Conditions:

1. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry point, or 80 °C at the

branching point of the conductors, the temperature specification of the selected cable shall be in compliance with

the actual measured temperature values.

2. Provisions shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than

40%.



IECEx Special Conditions:

1. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry point, or 80 °C at the

branching point of the conductors, the temperature specification of the selected cable shall be in compliance with

the actual measured temperature values.

2. Provisions shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than

40%.

3. The equipment shall only be used in an area of not more than pollution degree 2, as defined in IEC 60664-1.

SLAMf UL Listed Installation Instructions:

1. The hazardous locations classes, groups and division as described under products covered.

2. WARNING – EXPLOSION HAZARD – Do not disconnect equipment unless power has been removed or the area

is known to be non-hazardous.

3. WARNING – EXPLOSION HAZARD - Substitution of any components may impair suitability for Class I, Division 2.

4. To maintain type 4X/IP66 rating zero screw must be installed.

UL Recognized versions of SLAMf - Conditions of Acceptability:

1. These devices are to be used within their ratings.

2. These devices are to be mounted in a suitable enclosure in the end product rated not less than IP40.

3. The wiring terminals are suitable for field wiring.

4. The suitability of the wiring method is to be determined in the end-use application.

5. These devices are intended to be powered by a class 2 power source.

6. These devices were evaluated for use in a maximum ambient temperature of 65°C.

KOSHA Special Conditions:

1. The equipment shall only be used in an area of not more than pollution degree 2, as defined in KS C IEC 60664-1.

2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry point, or 80 °C at the

branching point of the conductors, the temperature specification of the selected cable shall be in compliance with

the actual measured temperature values.

3. The surge protector should be installed to prevent a transient voltage. (140% of rated voltage)

Table 1-5 Certifications - SLAMfXX

1-7

Models SLA5810/20 amd SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Figure 1-2 SLA5810/20 and SLAMf10/20 Analog/RS485 Connections and Pinouts

RS485 Communications

The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-2 (Analog I/O pin

connections), that enables the device to communicate via a personal computer for process control.

Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600, 19200 and 38400

baud and can be selected via the Brooks Expert Support Tool (BEST).

The RS485 is essentially a multidrop connection. It allows a maximum of 32 devices to be connected to a

computer system. IBM-compatible PC's are not equipped with RS485 ports as standard. An RS232/USB to RS485

converter or RS485 interface board is therefore required to connect an RS485 network to a standard PC. The

RS485 bus, a daisy chain network, meaning that the wires are connected at the units.

Note: Aux Input is used for Remote Transducer Pressure Controllers only.

Figure 1-1 Typical Configurations

1-8

Models SLA5810/20 and SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Figure 1-3 SLA5810/20 and SLAMF10/20 Profibus Connections and Pinouts

Profibus

Communications

The Brooks SLA58xx/SLAMfxx is now equipped to support the Profibus communication protocol. Profibus is a

fieldbus-based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus

links controller or control systems with decentralized field devices (sensors and actuators) on the field level and

also enables consistent data exchange with higher ranking communication systems. A 9-pin sub-D connector is

included on every device and is galvanic isolated from the main electronics as defined by the EN 50170 Profibus

standard to allow easy network connection separate from the main connector. The main 15-pin sub-D connector

or termination board is still needed for the power supply, but also allows for the standard analog I/O signals,

analog valve override, and (open-collector) alarm signaling to be used separate from the network connection.

The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud,

thus making the need for any hardware baud rate selection methods not required. For selecting the device

address, which must be unique on the network, two rotary switches are provided. This allows a user to easily

select any address number ranging from 0 to 126. This can provide fast device replacement without complex

network configurations. The Profibus-DP piggyback board is equipped with a zero command pushbutton, allowing

the user to give a manual command to the device to (re)balance the flow sensor electronics. This command can

also be issued through the protocol.

The Profibus-DP communication option supports the following message types:

• Cyclic data exchange (Write/Read data).

• Read inputs (e.g. status, flow, temperature, totalizer, etc.).

• Read outputs (e.g. commands, setpoint).

• Global control commands (e.g. fail safe, sync).

• Get configuration (i.e. read number of I/O bytes and composition).

• Read diagnostics information (i.e. get error and alarm status).

• Set parameters (i.e. select gas number, engineering units, I/O configuration

• Set parameters (i.e. select gas number, engineering units, I/O configuration etc.).

• Check configuration (i.e. check I/O composition).

Note: Aux Input is used for

Remote Transducer Pressure Controllers only.

1-9

Models SLA5810/20 amd SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

DeviceNet

Communications

The Brooks SLA58xx/SLAMfxx is also available with DeviceNet

communication capability. DeviceNet is an open

digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices

available on this popular networking standard, and is a member of ODVA

(Open DeviceNet Vendors Association),

the governing standard body for DeviceNet.

DeviceNet

is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to

be connected on the same network. Baud rate selections for DeviceNet

products are 125K, 250K and 500K and can

be selected via MAC ID switches mounted on the device.

The DeviceNet

communication link also provides access to many of the Brooks SLAMf Digital Series functions for

“control and monitor” operations, including:

• Accurate setpoint adjustment and flow output measurement (including units of measure selection)

• PID Settings (controller only)

• Valve Override (controller only)

• Calibration Gas Select

• Soft Start Control (controller only)

Figure 1-4 SLA5810/20 and SLAMf10/20 DeviceNet Connections and Pinouts

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

1-10

Models SLA5810/20 and SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Figure 1-6 Dimensions - Models SLA5810/20, Thru-Flow, Profibus

Figure 1-5 Dimensions - Models SLA5810/20, Thru-Flow, RS485

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

1-11

Models SLA5810/20 amd SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Figure 1-8 Dimensions - Models SLAMf10/20, Thru-Flow, RS485

Figure 1-7 Dimensions - Models SLA5810/20, Thru-Flow, DeviceNet

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

1-12

Models SLA5810/20 and SLAMf10/20

Section 1 Introduction

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

Figure 1-10 Dimensions - Models SLAMf10/20, Thru-Flow, DeviceNet

Figure 1-9 Dimensions - Models SLAMf10/20, Thru-Flow, Profibus

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

2-1

Section 2 Installation

Models SLA5810/20 and SLAMF10/20

Installation and Operation Manual

X-PR-SLA5800-SLAMF-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

2-1 General

This section contains the procedures for the receipt and installation of the

instrument. Do not attempt to start the system until the instrument has been

permanently installed. It is extremely important that the start-up procedures

be followed in the exact sequence presented.

2-2 Receipt of Equipment

When the equipment is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding his liability. A

report should be submitted to the nearest Brooks Instrument location listed

on the Global Service Network page on our website: BrooksInstrument.com/

GlobalSupportCenters

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is

recommended that the equipment be stored in accordance with the following:

a. Within the original shipping container.

b. Stored in a sheltered area, preferably a dry, temperature controlled room

c. 15°C (32°F) minimum, 35°C (149°F) maximum.

d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

e. Upon removal from storage a visual inspection should be conducted to

verify the condition of equipment is "as received".

2-4 Return Shipment

Prior to returning any instrument to the factory for any reason, visit our

website for instructions on how to obtain a Return Materials Authorization

Number (RMA #) and complete a Decontamination Statement to accompany

it: BrooksInstrument.com/Service. All instruments returned to Brooks also

require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the

instrument. Failure to provide this information will delay processing of the

instrument.

Instrument must have been purged in accordance with the following:

Tel

2-2

Section 2 Installation

Models SLA5810/20 and SLAMf10/20

Installation and Operation Manual

X-PR-SLA5800-SLAMf-Series-RevB-PC-eng

Part Number: 541B198AAG

January, 2017

2-5 Transit Precautions

To safeguard against damage during transit, transport the instrument to the

installation site in the same container used for transportation from the factory

if circumstances permit.

2-6 Removal from Storage

Upon removal from storage, a visual inspection should be conducted to verify

the condition of the equipment is “as received.” If the equipment has been in

storage in conditions in excess of those recommended

(See Section 2-3), the device should be subjected to a pneumatic pressure

test in accordance with applicable vessel codes.

2-7 Gas Connections

Prior to installation ensure all piping is clean and free from obstructions.

Install piping in such a manner that permits easy access to the instrument if

removal becomes necessary.

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the

pressure controller to prevent the possibility of any foreign material entering

the sensor or control valve. The filtering element should be replaced

periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter

100 sccm 2 micron

500 sccm 5 micron

1 to 5 slpm 10 micron

10 to 50 slpm 40 micron

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