Brooks VDM300 Kasutusjuhend

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October , 2018

Brooks

®

VDM300 Vapor Delivery Module

Brooks

®

VDM300

DI Water Vapor Delivery Module

VDM300

Vapor Delivery Module

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

•To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

•Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Dear Customer,

We appreciate this opportunity to service your vaporizer and ow control requirements with a Brooks Instrument

device. Every day, ow customers all over the world turn to Brooks Instrument for solutions to their gas and

liquid low-ow applications. Brooks provides an array of vaporizer, ow and pressure measurement and control

products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to

medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Ofce listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures

must be observed during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualied personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back

cover for local sales ofce contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarication.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• Install your equipment as specied in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate ow into the system. Open process valves slowly to avoid ow surges. (2) Check for leaks around the ow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualied people

use replacement parts specied by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in re, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualied persons.

WARNING: For liquid ow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must

be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment

Directive (PED).

• The Specications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under uid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC

directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specications for CE certication.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Paragraph Page

Number Number

Section 1 Introduction

1-1 Introduction.................................................................................................................................. 1-1

1-2 How To Use This Manual ............................................................................................................ 1-1

1-3 Product Support References ....................................................................................................... 1-2

1-4 Warning, Caution and Notice Statements ................................................................................... 1-2

1-5 Product Warranty ........................................................................................................................ 1-2

1-6 Glossary of Terms and Acronyms ................................................................................................ 1-2

1-7 Description .................................................................................................................................. 1-3

1-8 Specications for VDM300 Devices ............................................................................................ 1-4

1-9 Overview of VDM300 Device Enclosure ..................................................................................... 1-5

1-10 Internal Layout of VDM300 and Basic Function .......................................................................... 1-9

1-11 Dimensions of VDM300 Device Enclosure................................................................................. 1-10

Section 2 Installation

2-1 General........................................................................................................................................ 2-1

2-2 Receipt of Equipment .................................................................................................................. 2-1

2-3 Recommended Storage Practice ................................................................................................ 2-2

2-4 VDM300 Mounting and Orientation ............................................................................................. 2-2

2-5 Mechanical Connections ............................................................................................................. 2-2

2-5-1 Inlet Connections......................................................................................................................... 2-3

2-5-2 Outlet Connections ...................................................................................................................... 2-4

2-6 Electrical Connections ................................................................................................................. 2-4

2-7 Diagnostic Port Connection ......................................................................................................... 2-8

2-8 Return Shipment ......................................................................................................................... 2-8

2-9 Transit Precautions ..................................................................................................................... 2-8

2-10 Removal From Storage ............................................................................................................... 2-8

2-11 Product Safety Information .......................................................................................................... 2-9

Section 3 Startup

3 Operation..................................................................................................................................... 3-1

3-1 Idle Mode..................................................................................................................................... 3-1

3-2 Normal Mode ............................................................................................................................... 3-1

3-2-1 Start-up (Normal Mode) ............................................................................................................... 3-2

3-2-2 Ready-to-Use (Normal Mode) ..................................................................................................... 3-3

3-2-3 Zeroing the VDM300 ................................................................................................................... 3-3

3-2-3-1Procedure for Manually Zeroing the VDM300 ............................................................................. 3-4

3-3 Drain Mode .................................................................................................................................. 3-4

3-4 Operation of BEST for VDM300 .................................................................................................. 3-5

Section 4 Maintenance and Troubleshooting

4 Maintenance and Troubleshooting .............................................................................................. 4-1

4-1 Introduction.................................................................................................................................. 4-1

4-2 Routine Maintenance .................................................................................................................. 4-1

4-3 Troubleshooting the VDM ............................................................................................................ 4-2

4-4 General Troubleshooting Guide .................................................................................................. 4-3

4-5 Using BEST as a Diagnostic Tool ................................................................................................ 4-4

4-6 VDM300 Removal ....................................................................................................................... 4-9

4-7 VDM300 Packaging..................................................................................................................... 4-9

4-8 VDM300 Shipping ....................................................................................................................... 4-9

i ii

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Paragraph Page

Number Number

Section 5 Product Description Code

5 VDM300 Product Description Code ............................................................................................ 5-1

Section A Essential Instructions .............................................................................................................. A-1

Warranty, Local Sales/Service Contact Information ........................................................................Back Cover

Figures

Figure Page

Number Number

1-1 VDM Vapor Delivery Module ...................................................................................................... 1-1

1-2 Front View of the VDM300 ......................................................................................................... 1-5

1-3 Front View Details of the VDM300 LED Indicators ..................................................................... 1-6

1-4 Bottom View of the VDM ............................................................................................................. 1-7

1-5 VDM300 Block Diagram ............................................................................................................. 1-9

2-1 VDM300 Installation Orientation.................................................................................................. 2-3

2-2 Diagram of Electrical Connections to the VDM300 .................................................................... 2-5

Tables

Table Page

Number Number

1-1 Terms and Acronyms ................................................................................................................... 1-2

1-2 Specications for Standard VDM300 .......................................................................................... 1-4

2-1 VDM300 Analog Connector Pin-Out............................................................................................ 2-6

3-1 Signals Required for Switching Modes on the VDM300.............................................................. 3-1

4-1 General Troubleshooting Information and Courses of Action ...................................................... 4-3

4-2 List of Possible Alarm Codes Detected by the VDM300 ............................................................. 4-4

5-1 VDM Product Description Code .................................................................................................. 5-1

i ii

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

1-1 Introduction

The VDM300 is a self-contained, ultra-high purity vapor delivery module

providing precise, low ow deionized (DI) water vapor for high purity applica-

tions such as microelectronics manufacturing. Utilizing a heated, all-welded

titanium vapor tank with automated level-sensing and lling, the VDM300

produces vapor ow in a non-superheated vapor stage to reduce the ag-

gressive effects of DI water. Vapor ow is controlled by an integrated Brooks

Instrument high temperature thermal mass ow controller. The thermal mass

ow controller is a high stability ow sensor compatible with the elevated

internal temperatures found in the VDM300.

1-2 How To Use This Manual

This manual is intended to provide the user with all the information necessary

to install, operate, troubleshoot and maintain this vaporizer. The manual is

organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

Figure 1-1 VDM Vapor Delivery Module

1-1 1-2

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service locations

and to obtain other documents that support the VDM300 Series.

Those documents include:

• Brooks VDM300 data sheet (DS-VAP-VDM300-eng)

• Supplemental Manual for Brooks

®

Instrument EtherCAT for VDM300

Series (X-DPT-EtherCAT-VDM300-eng; part number: 541B217AAG)

• Supplemental Manual for Brooks Instrument Expert Support Tool

(X-SW-BEST-eng; part number 541B197AAG)

1-4 Warning, Caution and Notice Statements

Warning, caution and notice statements are located throughout this manual

in ANSI format.

A WARNING statement indicates a potentially hazardous situation which, if

not avoided, COULD result in death or serious injury.

A CAUTION statement indicates a potentially hazardous situation which, if

not avoided, MAY result in minor or moderate injury. It may also be used to

alert against unsafe practices.

A NOTICE statement describes specic information that requires special at-

tention.

1-5 Product Warranty

Product warranty information can be found on the back cover of this

manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers,

and applicable warranty periods according to product group.

1-6 Glossary of Terms and Acronyms (Refer to Table 1-1)

Table 1-1 Terms and Acronyms

Term/ Acronym Definition

BEST Brooks Expert Support Tool (GUI)

COO Cost of Ownership

DIW Deionized Water

DSP Digital Signal Processor

EtherCAT Ethernet for Control Automation Technology is an open high

performance Ethernet-based fieldbus system

F.S. Full scale

GUI Graphical user interface (refer to BEST)

IEC International Electrotechnical Commission

LA Link Active

LED Light-emitting diode

MFC Mass flow controller

PID Proportional Integral Derivative

PDC Product description code

PSID Pounds per square inch differential

PSIG Pounds per square inch gauge

RH Relative humidity

RJ-45 Standard type of connector for network cables featuring eight

pins to which the wire strands of a cable interface electrically

SDS Safety data sheet

S.P. Setpoint

1-1 1-2

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

1-7 Description

The VDM300 is a self-contained, ultra-high purity vapor delivery module

providing precise, low ow deionized (DI) water vapor for high purity applica-

tions such as microelectronics manufacturing. Utilizing a heated, all-welded

titanium vapor tank with automated level-sensing and lling, the VDM300

produces vapor ow in a non-superheated vapor stage to reduce the ag-

gressive effects of DI water. Vapor ow is controlled by an integrated Brooks

Instrument high temperature thermal mass ow controller. The mass ow

sensor is a high stability ow sensor compatible with the elevated internal

temperatures found in the VDM300.

The result is a highly accurate, robust and responsive vapor delivery module

for challenging conditions.

• High temperature capability ensures reliable delivery of condensable gases

and precursors

• Digital measurement and control enhances accuracy (±1% of setpoint

>10% FS) and repeatability (±0.2% F.S.)

• Ultra-high purity vapor ow path ensures integrity and purity of the gas/va-

por

• Ultra-stable ow sensor reduces maintenance resulting in superior uptime

and lower cost of ownership (COO)

• All metal diaphragm-free control valve design optimizes reliability

Ultra High Purity Flow Path

• The mass ow controllers are constructed with a 10µ in Ra max surface

nish.

• Overall reduced surface area and un-swept volumes for faster dry-down

during purge steps

• Long-term sensor and device stability for maximum yield and throughput

Ultra High Purity Process Connections

VDM300 supports all metal seal/UHP industry gas connection interface stan-

dards for full OEM and process coverage.

• DI Water Inlet: ¼” VCR Male or ¼” tube compression tting

• DI Water Vapor Outlet: 3/8-½” VCR Male tting

• Tank Drain: 1/8" Instant Tube tting

Analog & Digital Interfaces

The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc)

digital controls and alarms or optionally up to 24 Vdc when using an external

power supply, a USB diagnostic port, and EtherCAT communications. Analog

and digital controls are transmitted via the 15-pin D-subminiature connec-

tor. Reference Table 2-1 for pin assignments. USB digital communication is

transmitted via the micro-USB diagnostics port. Optional EtherCAT digital

communication is transmitted via the dual RJ-45 connectors. Reference

Supplemental Manual for Brooks Instrument EtherCAT for VDM300 Series

(X-DPT-VDM300-EtherCAT) for EtherCAT assignments and Supplemental

Manual for Brooks Instrument Brooks Expert Support Tool (X-SW-BEST-eng)

for diagnostic port communication.

1-3 1-4

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Table 1-2 Specications for Standard VDM300

1-8 Specications for VDM300 Devices (See Table 1-2)

Description

Performance

Specications

1

Full Scale Ranges (H

2

O)

3000 sccm

Turndown Ratio

20:1

Step Response

Time

≤ 2 seconds (±2% of setpoint)

Accuracy

±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)

Linearity

±0.5% of full scale

Repeatability

±0.2% of full scale

Temperature Coecient

0.05% F.S. per °C (zero and span)

Valve Shutdown

<0.5% F.S. (water vapor)

Electrical

Communication

Analog or EtherCAT

Connections

15-pin D-Sub and dual RJ-45

Input Signals

Flow setpoint (0 to 5 Vdc)

Start up/drain

Output Signals

Flow output (0 to 5 Vdc)

Ready to use

Power

DC: ±15 Vdc ±5% @ 1.2 amp

AC: 208-230 Vac, 50/60 Hz, 290 watts nominal

Diagnostic Port

Micro USB

Mechanical

Fittings

See Model Code for list

Weight

Dry: 15lbs Wet: 16lbs

Mounting Orientation

Vertical (inlet down)

Environmental

Maximum Outlet Pressure

≤200 Torr

DI Water Supply Pressure

10 to 40 psig (20 psig recommended)

DI Water Quality

UHP: ≥18 mega ohm-cm

N

22

2

Purge Pressure

10 to 40 psig (20 psig recommended)

Ambient

Temperature Range

15°C to 45°C

Humidity

0 to 95% RH, non-condensing

Certications

Electromagnetic Compatibility

Fully compliant to Directive 2014/30/EU (EN: 61326-1:2013)

Low Voltage

L Fully compliant to Directive 2014/35/EC (EN: 61010-1:2010)

RoHS

Fully compliant to Directive 2011/65/EU

REACH

Fully compliant to Directive EC 1907/2006

SEMI E54.20-1108

Standard for Sensor/Actuator Network Communication for EtherCAT

1. All performance specications apply only in the ready state, ready light on.

Special conditions safe use:

for

A. To ensure full EMC protection

the

ferrite core included with the device (Wurth Electronics Inc Part Number 74271131 ) must be installed to the control cable.

B. To ensure full EMC protection a shielded AC power cable and a shielded control cable (<30 m. length) must be supplied by the user.

1-3 1-4

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Figure 1-2 Front View of the VDM300

1-9 Overview of VDM300 Device Enclosure

1-5 1-6

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Figure 1-3 Front View Details of the VDM300 LED Indicators

Figure 1-3 (above) shows a detailed view of the switches and indicators

located on the front of the VDM300. The following is a description of each

switch and indicator.

ZERO: This is a momentary detent switch that activates a zeroing function to

remove any zero offset that may have accumulated over time during normal

VDM300 operation. Refer to the section called VDM300 Zeroing later in this

manual for information on when and how to use this function properly.

DEVICE READY: (Green LED)This indicates when the VDM300 is Ready-

to-Use (RTU). lt also serves as an indicator when a drain cycle is complete

(blinkíng).

WARM UP: (Amber LED)This indicates when the VDM300 is warming up

(solid) or at the desired temperature (blinking).

DEVICE FAULT: (Red LED) This indicates an alarm/fault condition.

ECAT ERR: (Red LED) Indicates EtherCAT error status. See the Supple-

mental Manual for Brooks Instrument EtherCAT for VDM300 Series ( X-DPT-

VDM300-EtherCAT) for details on the various states.

ECAT ID: These three 16-position rotary switches (X100, X10 and X1) are

used to set the serial address for the VDM300 device in EtherCAT communi-

cation networks. The three switches create a 3-digit address as in the follow-

ing example: if the X100 switch is set to “A”, the X10 switch to “5” and the X1

to “B”, the serial address would be “A5B”.

1-5 1-6

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Figure 1-4 Bottom View of the VDM

Figure 1-4 is a diagram of the bottom view of the VDM300. The following is a

description of the various connections and features:

A. lnput/Output: This connection is a 15-Pin D-subminiature (DB-15) plug

(male). DC power and operational signals are routed through this connector.

Reference Table 2-1 for details.

B. DIAG: This connection is a micro USB port. This provides communication

access to the VDM300 for use by the Brooks Expert Support Tool (BEST).

See Section 3-4 Operation of the GUI for VDM300 and the Brooks GUl

manual for information on how to properly connect to and utilize this port.

C. EtherCAT: This connection is a dual RJ-45 connection. This connection

1-7 1-8

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

allows the user to send commands and set points and receive ow and alarm

signals from the VDM300 utilizing an EtherCAT network. See Figure 1-4.

D. Power Entry Module: The power entry module is used to connect AC

power to the VDM300 tank heaters. See Section 1-13 VDM300 lnternal Lay-

out and Basic Function for more details about the tank heaters. The VDM300

is congured to accept 208-230 VAC power, provided by the end user, via a

shielded AC power cord with an IEC C-13 connector.

The power entry module consists of 3 main features as follows:

a. The AC input plug is a standard IEC C-14 connector where AC power can

be connected to the VDM300.

b. The ON/OFF switch for switching AC power to the VDM300 tank

heaters on or off. Please note that you cannot "power cycle" the device from

this switch; only the tank heaters.

c. The fuse drawer holds two 250V 3A fuses to protect the AC tank heaters.

E. Dl Water lnlet: This is where the Dl water supply is to be connected by

the end user. The tting is either a 1/4" VCR Male tting or a 1/4"

compression tube tting depending on the conguration ordered. Ensure the

DI water source is equal to or better than UHP (≥ 18 mega ohm-cm). This is

also where a nitrogen gas supply is to be connected for the purpose of

draining the VDM300. Ensure that either uid is pressurized to 10 - 40 psig.

See Section 2-5-1 Inlet Connections for more details and instructions on how

to connect Dl water and/or N2 to the inlet.

F. Tank Drain: This is a 1/8" lnstant Tube Fitting. This is the outlet through

which the Dl water is drained from the tank. See Section 1-10 VDM300 lnter-

nal Layout and Basic Function for more details about the tank.

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Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

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VDM300 Vapor Delivery Module

1-10 Internal Layout of VDM300 and Basic Function

Figure 1-5 below illustrates the internal layout of the VDM300 system. The

VDM300 has a titanium tank inside that serves as a reservoir for Dl water

and a Mass Flow Controller (MFC).The Dl water is heated to the vapor state

in the tank through the use of heaters attached to the tank and a heater

control system along with the vacuum outlet pressure. The liquid water level

is monitored by a level detection system (not shown in diagram) in the tank.

The MFC delivers the appropriate amount of Dl water vapor on demand

through the Dl water vapor outlet. The ll valve controls the ow of Dl water

into the tank which works in tandem with the level detection system to main-

tain the optimal amount of liquid Dl water in the tank for vaporization during

operation. The tank drain controlled by the drain valve allows the tank to be

emptied for maintenance and extended periods of downtime.

Figure 1-5 VDM300 Block Diagram

1-9

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

2-1 General

This section provides installation instructions for the Brooks VDM300 Vapor

Delivery Module. The installation of the VDM300 involves mounting the de-

vice, making the required mechanical connections and making the required

electrical connections

2-2 Receipt of Equipment

When the instrument is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is dam-

aged, the local carrier should be notied at once regarding their liability. A

report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. Vine Street

P.O. Box 903

Hateld, PA 19440 USA

Toll Free (888) 554 FLOW (3569)

Tel (215) 362 3700

Fax (215) 362 3745

E-mail: [email protected]

www.BrooksInstrument.com

Europe Asia

Brooks Instrument GmbH Brooks Instrument Korea, Ltd.

Zur Wetterwarte 50 Haus 377/B, D-406 Bundang Techno Park 151

01109 Dresden Sungnam, Kyungki-do, 463-070

Germany Korea

Tel +49 (0) 351 215 20 442 Tel +82 31 708 2522

In case you need technical assistance:

USA 888 275 8946 Taiwan +886 3 5590 988

Europe +49 351 215 2040 China +86 21 5079 8828

Japan +81 3 5633 7100 Singapore +6297 9741

Korea +82 31 708 2521

Remove the envelope containing the packing list. Unpack and inspect

the VDM300 and additional items for any possible shipping damage. The

VDM300 is shipped with two each 312 series replacement fuses for the

power entry module, a 6’ length of 1/8" O.D. Teon tubing, a ferrite core for

the control cable, the certicate of conformance/ nal test data and the Instal-

lation & Operations Manual. The tubing can be connected to the tank drain

when draining Dl water from the tank inside the VDM300. Contact Brooks if

there are any problems or if more information is required.

The following items can be purchased separately; these items are not neces-

sary for the installation and are not used for normal operation of the VDM300

but can be utilized for troubleshooting:

The Brooks Expert Support Tool (BEST) provides diagnostic tools and an

alternate access to VDM300 functions.

NOTE: The BEST must be installed on a separate computer in order to perform any

diagnostic function. Contact Brooks for information on purchasing the software.

1-1 2-1

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it is recom-

mended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C

(45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 VDM300 Mounting and Orientation

Figure 2-1 shows the proper mounting orientation for the VDM300.The

VDM300 should be mounted using four 5/16" (7.9mm) screws tightening

them to the screw manufacturer’s recommended specications.

2-5 Mechanical Connections

Figure 1-6 shows the mechanical dimensions of the VDM300

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free from

shock and vibration.

• Install the device in such a manner that permits easy purge and removal if

the device requires servicing.

Prior to installation, ensure that all piping is clean and free from obstructions.

Install piping in such a manner that permits easy access to the device if re-

moval becomes necessary.

2-2 2-3

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Figure 2-1 VDM300 Installation Orientation

2-2 2-3

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

2-5-1 Inlet Connections

Dl Water & Nitrogen lnlet: The VDM300 can be ordered with a 1/4" VCR

male tting or a 1/4" tube compression tting. This inlet is where the Dl water

source is connected for normal operation, or where the nitrogen source is

connected when draining the VDM300. It is up to the user to make sure that

the proper source is available for the particular mode of operation desired.

NOTE: The inlet pressure for both uid sources must be between 10-40 psig

for proper operation.

Tank Drain: The VDM300 has a 1/8" lnstant Tube Fitting. This is the port

where the water will drain out of the tank of the VDM300.Make sure that

the 1/8" drain tube is properly connected to this port when draining the tank

The tubing should bottom out in the tting. Leave this drain line permanently

connected as repeated coupling and uncoupling can cause unnecessarily

damage the tubing.

2-5-2 Outlet Connections

Vapor Outlet: The VDM300 has a 1/2" VCR male tting for this connection.

The VDM300 is designed to deliver vapor into a vacuum so be sure that the

connection to the tool will remain at or below 200 Torr during normal

operation.

Because the internal MFC control valve is not a complete shutoff valve, it

is highly recommended that a shutoff valve be installed downstream of the

VDM300 to isolate it during device zeroing.

2-4 2-5

Installation and Operation Manual

X-VAP-VDM300-eng

Part Number: 541B210AAG

October, 2018

Brooks

®

VDM300 Vapor Delivery Module

Figure 2-2 Diagram of Electrical Connections to the VDM300

2-6 Electrical Connections

Figure 2-2 shows a diagram of the electrical connections that go to the

VDM300. Read through the following connection descriptions and make

certain that the interfacing connections from the user side meet the required

specications before any actual connections are made to the VDM300. De-

tailed instructions on how to make the electrical connections will follow.

2-4 2-5

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